Band Excitation Method Applicable to Scanning Probe Microscopy
First Claim
Patent Images
1. A method, comprising:
- generating an excitation signal;
simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal;
scanning a sample held in an apparatus to measure a response of the probe across a subset of frequencies of the predetermined frequency band; and
separately extracting, by a processor of a relevant dynamic parameter extractor, resonant frequency, maximum amplitude, and Q factor parameters associated with each position crossed during the scan.
0 Assignments
0 Petitions
Accused Products
Abstract
Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.
23 Citations
9 Claims
-
1. A method, comprising:
-
generating an excitation signal; simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal; scanning a sample held in an apparatus to measure a response of the probe across a subset of frequencies of the predetermined frequency band; and separately extracting, by a processor of a relevant dynamic parameter extractor, resonant frequency, maximum amplitude, and Q factor parameters associated with each position crossed during the scan. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification