LIGHT SENSING DEVICE AND MANUFACTURING METHOD THEREOF

• US 20150295006A1
• Filed: 11/26/2014
• Published: 10/15/2015
• Est. Priority Date: 04/15/2014
• Status: Abandoned Application

• Current Assignee: AU Optronics Corporation
• Original Assignee: AU Optronics Corporation
• Inventors: Cho, An-Thung, Chang, Jiun-Jye, Chang, Chun, Chen, Ching-Wen
• Application Number:
  US14/554,072
• Publication Number:
  US 20150295006A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/105 the potential barrier being of the PIN type
• CPC Class Codes: H01L 31/1055 the devices comprising amorphous materials of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO

Abstract

A light sensing device includes a substrate, a control unit and a light sensing unit. The control unit and the light sensing unit are disposed on the substrate. The control unit includes a gate electrode, a gate insulation layer, an oxide semiconductor pattern, a source electrode and a drain electrode. The gate insulation layer is disposed on the gate electrode, and the oxide semiconductor pattern is disposed on the gate insulation layer. The light sensing unit includes a bottom electrode, a light sensing diode and a top electrode. The light sensing diode is disposed on the bottom electrode, and the top electrode is disposed on the light sensing diode. The gate insulation layer partially covers the top electrode, and the gate insulation layer has a first opening partially exposing the bottom electrode. The drain electrode is electrically connected to the bottom electrode via the first opening.

Claims

1. A light sensing device, comprising:

a substrate;

a control unit, disposed on the substrate, the control unit comprising;

a gate electrode;

a gate insulation layer, disposed on the gate electrode;

an oxide semiconductor pattern, disposed on the gate insulation layer; and

a source electrode and a drain electrode, wherein the source electrode and the drain electrode are disposed corresponding to the oxide semiconductor pattern; and

a sensing unit, disposed on the substrate, and the sensing unit comprising;

a bottom electrode;

a light sensing diode, disposed on the bottom electrode; and

a top electrode, disposed on the light sensing diode, wherein the gate insulation layer partially covers the top electrode, the gate insulation layer has a first opening partially exposing the bottom electrode, and the drain electrode is electrically connected to the bottom electrode via the first opening.

2. The light sensing device according to claim 1, further comprising:

a protection layer, covering the control unit and the light sensing unit;

a second opening, penetrating the protection layer and the gate insulation layer to at least partially expose the top electrode; and

a transparent conductive pattern, disposed on the protection layer, wherein the transparent conductive pattern is electrically connected to the top electrode via the second opening.

3. The light sensing device according to claim 2, further comprising:

a light shielding pattern, disposed on the protection layer, wherein the light shielding pattern at least partially overlaps the control unit.

4. The light sensing device according to claim 3, wherein the light shielding pattern is disposed on the transparent conductive pattern and is electrically connected to the transparent conductive pattern.

5. The light sensing device according to claim 3, wherein the light shielding pattern does not overlap the transparent conductive pattern, and the light shielding pattern is electrically isolated from the transparent conductive pattern.

6. The light sensing device according to claim 3, wherein the protection layer has a third opening, the third opening at least partially exposes the source electrode, and the light shielding pattern is electrically connected to the source electrode via the third opening.

7. The light sensing device according to claim 1, further comprising an insulation pattern, partially overlapping the light sensing diode, and the insulation pattern being disposed between the light sensing diode and the gate insulation layer.

8. The light sensing device according to claim 1, wherein the light sensing diode comprises:

an N type semiconductor pattern;

an intrinsic semiconductor pattern, disposed on the N type semiconductor pattern; and

a P type semiconductor pattern, disposed on the intrinsic semiconductor pattern.

9. A manufacturing method of a light sensing device, comprising:

providing a substrate;

forming a gate electrode on the substrate;

forming a light sensing unit on the substrate, wherein the light sensing unit comprises;

a bottom electrode;

a light sensing diode, disposed on the bottom electrode; and

a top electrode, disposed on the light sensing diode;

forming a gate insulation layer, covering the substrate, the gate electrode and the light sensing unit;

forming an oxide semiconductor pattern on the gate insulation layer;

forming a first opening in the gate insulation layer, the first opening partially exposing the bottom electrode; and

forming a source electrode and a drain electrode on the gate insulation layer, wherein the gate electrode, the gate insulation layer, the oxide semiconductor pattern, the source electrode and the drain electrode are stacked to compose a control unit, and the drain electrode is electrically connected to the bottom electrode via the first opening.

10. The manufacturing method of the light sensing device according to claim 9, further comprising:

forming a protection layer, covering the control unit and the light sensing unit;

forming a second opening in the protection layer and the gate insulation layer, the second opening penetrating the protection layer and the gate insulation layer to at least partially expose the top electrode; and

forming a transparent conductive pattern on the protection layer, wherein the transparent conductive pattern is electrically connected to the top electrode via the second opening.

11. The manufacturing method of the light sensing device according to claim 10, further comprising forming alight shielding pattern on the protection layer, wherein the light shielding pattern at least partially overlaps the control unit.

12. The manufacturing method of the light sensing device according to claim 11, wherein the light shielding pattern does not overlap the transparent conductive pattern, and the light shielding pattern is electrically isolated from the transparent conductive pattern.

13. The manufacturing method of the light sensing device according to claim 12, further comprising forming a third opening in the protection layer, the third opening at least partially exposing the source electrode, and the light shielding pattern being electrically connected to the source electrode via the third opening.

14. The manufacturing method of the light sensing device according to claim 10, further comprising forming a light shielding pattern on the transparent conductive pattern, wherein the light shielding pattern at least partially overlaps the control unit, and the light shielding pattern is electrically connected to the transparent conductive pattern.

15. The manufacturing method of the light sensing device according to claim 9, further comprising forming an insulation pattern on the light sensing unit before forming the gate insulation layer.

16. The manufacturing method of the light sensing device according to claim 9, wherein the gate electrode and the bottom electrode are formed through patterning a same conductive layer.

17. The manufacturing method of the light sensing device according to claim 9, wherein a forming method of the light sensing diode comprising:

forming an N type semiconductor layer, an intrinsic semiconductor layer and a P type semiconductor layer on the bottom electrode sequentially; and

patterning the N type semiconductor layer, the intrinsic semiconductor layer and the P type semiconductor layer to form an N type semiconductor pattern, an intrinsic semiconductor pattern and a P type semiconductor pattern stacked with each other on the bottom electrode.

18. The manufacturing method of the light sensing device according to claim 9, wherein a forming method of the light sensing diode and the top electrode comprising:

forming an N type semiconductor layer, an intrinsic semiconductor layer and a P type semiconductor layer on the bottom electrode sequentially;

forming a transparent conductive layer on the P type semiconductor layer;

patterning the transparent conductive layer to form the top electrode; and

patterning the N type semiconductor layer, the intrinsic semiconductor layer and the P type semiconductor layer, to form an N type semiconductor pattern, an intrinsic semiconductor pattern and a P type semiconductor pattern stacked with each other on the bottom electrode.