SEMICONDUCTOR DEVICE
First Claim
1. :
- A semiconductor device comprising a substrate, and a thin-film transistor supported on the substrate, wherein;
the thin-film transistor includes an oxide semiconductor layer, a gate electrode, a gate insulating layer formed between the gate electrode and the oxide semiconductor layer, and a source electrode and a drain electrode which are in contact with the oxide semiconductor layer;
each of the source electrode and the drain electrode includes;
a main layer including a first metal;
a lower layer arranged on the substrate side of the main layer, the lower layer including, in this order away from the main layer, a lower metal nitride layer made of a nitride of a second metal and a lower metal layer made of the second metal; and
an upper layer arranged on the opposite side of the main layer from the substrate, the upper layer including, in this order away from the main layer, an upper metal nitride layer made of a nitride of the second metal and an upper metal layer made of the second metal; and
the first metal is aluminum or copper, and the second metal is titanium or molybdenum.
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Accused Products
Abstract
This semiconductor device (201) includes a thin-film transistor (101) having an oxide semiconductor layer (5), wherein each of a source electrode (7) and a drain electrode (9) of the thin-film transistor (101) includes: a main layer (7a, 9a) containing a first metal; a lower layer (7c, 9c) arranged on the substrate side of the main layer, the lower layer (7c, 9c) including, in this order away from the main layer, a lower metal nitride layer made of a nitride of a second metal and a lower metal layer made of the second metal; and an upper layer (7b, 9b) arranged on the opposite side of the main layer from the substrate, the upper layer (7b, 9b) including, in this order away from the main layer, an upper metal nitride layer made of a nitride of the second metal and an upper metal layer made of the second metal, and wherein the first metal is aluminum or copper and the second metal is titanium or molybdenum.
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Citations
9 Claims
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1. :
- A semiconductor device comprising a substrate, and a thin-film transistor supported on the substrate, wherein;
the thin-film transistor includes an oxide semiconductor layer, a gate electrode, a gate insulating layer formed between the gate electrode and the oxide semiconductor layer, and a source electrode and a drain electrode which are in contact with the oxide semiconductor layer; each of the source electrode and the drain electrode includes; a main layer including a first metal; a lower layer arranged on the substrate side of the main layer, the lower layer including, in this order away from the main layer, a lower metal nitride layer made of a nitride of a second metal and a lower metal layer made of the second metal; and an upper layer arranged on the opposite side of the main layer from the substrate, the upper layer including, in this order away from the main layer, an upper metal nitride layer made of a nitride of the second metal and an upper metal layer made of the second metal; and the first metal is aluminum or copper, and the second metal is titanium or molybdenum. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- A semiconductor device comprising a substrate, and a thin-film transistor supported on the substrate, wherein;
Specification