ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
First Claim
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1. An electronic device comprising:
- a first functional element including a first movable element that moves in a first axis direction, and a first dummy electrode;
a second functional element including a second movable element that moves in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and
a first wiring interconnecting the first dummy electrode and the second dummy electrode.
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Abstract
An electronic device includes a first functional element including a first movable element capable of moving in a first axis direction, and a first dummy electrode; a second functional element including a second movable element capable of moving in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and a first wiring interconnecting the first dummy electrode and the second dummy electrode.
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Citations
20 Claims
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1. An electronic device comprising:
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a first functional element including a first movable element that moves in a first axis direction, and a first dummy electrode; a second functional element including a second movable element that moves in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and a first wiring interconnecting the first dummy electrode and the second dummy electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification