MEASUREMENT SYSTEM INCLUDING A NETWORK OF NANOELECTROMECHANICAL SYSTEM RESONATORS
First Claim
1. A measurement system comprising a network of nanoelectromechanical system (NEMS) resonators, wherein:
- each of said resonators comprises;
an input for receiving an excitation signal and an output for supplying an output signal in response to said excitation signal, said output signal exhibiting resonance at the resonant frequency of the resonator,a beam suspended with respect to a support, the natural resonant frequency of the resonator corresponding to the natural resonant frequency of said beam,an electrostatic activation device capable of generating a vibration of said beam under the effect of said excitation signal,at least one piezoresistive strain gauge made of doped semiconductor material, suspended with respect to said support and extending from the beam in such a way as to detect a displacement of said beam, the variation in electrical resistance of said at least one gauge supplying said output signal,said network comprises at least two groups of resonators, each group comprising at least two resonators exhibiting an identical natural resonant frequency, each group of resonators exhibiting a different natural resonant frequency from that of each other group,the system comprises a memory wherein an item of information relating to the natural resonant frequency of each resonator or group of resonators is stored,the resonators forming each group are connected in parallel, each group comprising an input and an output respectively connected to the input and output of each of said resonators, the groups of resonators forming said network are connected in parallel, said network comprising an input and an output respectively connected to the input and the output of each of said groups of resonators, andsaid system comprises a reading device designed to supply an excitation signal to the input of the network and to determine the resonant frequency of a selected group of resonators by injecting into said excitation signal a frequency component corresponding to the natural resonant frequency stored in the memory for each selected group of resonators and by identifying, in the output signal of the network, a frequency component at the resonant frequency of the selected group of resonators.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and to determine the resonance frequency of a group of resonators which is selected by injecting, into said excitation signal, a frequency component corresponding to the empty resonance frequency of each selected group of resonators, and by identifying, in the output signal of the network, a resonance frequency component of the selected group of resonators.
-
Citations
18 Claims
-
1. A measurement system comprising a network of nanoelectromechanical system (NEMS) resonators, wherein:
-
each of said resonators comprises; an input for receiving an excitation signal and an output for supplying an output signal in response to said excitation signal, said output signal exhibiting resonance at the resonant frequency of the resonator, a beam suspended with respect to a support, the natural resonant frequency of the resonator corresponding to the natural resonant frequency of said beam, an electrostatic activation device capable of generating a vibration of said beam under the effect of said excitation signal, at least one piezoresistive strain gauge made of doped semiconductor material, suspended with respect to said support and extending from the beam in such a way as to detect a displacement of said beam, the variation in electrical resistance of said at least one gauge supplying said output signal, said network comprises at least two groups of resonators, each group comprising at least two resonators exhibiting an identical natural resonant frequency, each group of resonators exhibiting a different natural resonant frequency from that of each other group, the system comprises a memory wherein an item of information relating to the natural resonant frequency of each resonator or group of resonators is stored, the resonators forming each group are connected in parallel, each group comprising an input and an output respectively connected to the input and output of each of said resonators, the groups of resonators forming said network are connected in parallel, said network comprising an input and an output respectively connected to the input and the output of each of said groups of resonators, and said system comprises a reading device designed to supply an excitation signal to the input of the network and to determine the resonant frequency of a selected group of resonators by injecting into said excitation signal a frequency component corresponding to the natural resonant frequency stored in the memory for each selected group of resonators and by identifying, in the output signal of the network, a frequency component at the resonant frequency of the selected group of resonators. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
-
Specification