SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Accused Products
Abstract
In a cell region of a first major surface of a semiconductor substrate of a first conductivity type, a first well of a second conductivity type is in an upper surface. A diffusion region of a first conductivity type is in the upper surface in the first well. A first gate insulating film is on the first well, and a first gate electrode on the first gate insulating film. A second well of a second conductivity type is in the upper surface of the first major surface on a peripheral portion of the cell region. A second gate insulating film is on the second well, and a thick field oxide film is on the peripheral side than the second gate insulating film. A second gate electrode is sequentially on the second gate insulating film and the field oxide film and electrically connected to the first gate electrode. A first electrode is connected to the first, second well and the diffusion region. A second electrode is connected on a second major surface of the semiconductor substrate. A gate wiring is on the field oxide film, going around a periphery of the cell region, and electrically connected to the second gate electrode. The gate wiring is a silicide of a constituting substance of the second gate electrode.
8 Citations
21 Claims
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1. (canceled)
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2. A semiconductor device comprising:
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a semiconductor substrate having a first major surface and a second major surface facing each other; a drift layer of a first conductivity type on the first major surface; a first well of a second conductivity type in an upper portion of the drift layer disposed in a center of the semiconductor device; a diffusion layer of a first conductivity type in an upper portion of the first well; a second well of a second conductivity type in another upper portion of the drift layer disposed in a peripheral region of the semiconductor device; a first electrode above the first major surface of the semiconductor substrate that is electrically connected to the first well and the second well; a second electrode under the second major surface of the semiconductor substrate; a first gate insulating film on the first well; a second gate insulating film on the second well; a field oxide film on the second well having a thickness larger than a thickness of the gate insulating film; a gate electrode on the second gate insulating film and the field oxide film; and a gate wiring film including a silicide and disposed on the field oxide film; wherein a bottom surface of the gate wiring contacts a top surface of the field oxide; and an inner peripheral surface of the gate wiring contacts the gate electrode. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor device comprising:
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a semiconductor substrate having a first major surface and a second major surface facing each other; a drift layer of a first conductivity type on the first major surface; a first well of a second conductivity type in an upper portion of the drift layer disposed in a center of the semiconductor device; a diffusion layer of a first conductivity type in an upper portion of the first well; a second well of a second conductivity type in another upper portion of the drift layer disposed in a peripheral region of the semiconductor device; a first electrode above the first major surface of the semiconductor substrate that is electrically connected to the first well and the second well; a second electrode under the second major surface of the semiconductor substrate; a first gate insulating film on the first well; a second gate insulating film on the second well; a field oxide film on the second well having a thickness larger than a thickness of the gate insulating film; a gate electrode on the second gate insulating film and the field oxide film; an interlayer insulating film disposed on the gate electrode and having a contact hole; and a gate wiring including a silicide and disposed on an interlayer insulating film at a bottom of the contact hole of the interlayer insulating film; wherein a width of the contact hole of the interlayer insulating film is 0.1 μ
m to 100 μ
m. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification