POWER-GENERATING DEVICE
First Claim
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1. A power-generating device comprising:
- a piezoelectric power-generating transducer includinga vibration plate having a free end, a fixed end, and a first main surface, the vibration plate being configured to vibrate in a direction perpendicular to the first main surface,a first lower electrode disposed on the first main surface of the vibration plate,a first piezoelectric layer made of piezoelectric material disposed on the first lower electrode, anda first upper electrode disposed on the first piezoelectric layer to face the first lower electrode across the first piezoelectric layer;
a fixing member supporting the fixed end of the vibration plate;
a first output terminal connected to the first lower electrode; and
a second output terminal connected to the first upper electrode,wherein the vibration plate applies first compressive stress to the first piezoelectric layer when the vibration plate does not vibrate.
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Abstract
A power-generating device includes a vibration plate, a lower electrode on the vibration plate, a piezoelectric layer made of piezoelectric material on the lower electrode, and an upper electrode on the piezoelectric layer, a fixing member for supporting a fixed end of the vibration plate. The vibration plate applies compressive stress to the piezoelectric layer when the vibration plate does not vibrate. The power generating device is excellent in long-term reliability.
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Citations
20 Claims
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1. A power-generating device comprising:
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a piezoelectric power-generating transducer including a vibration plate having a free end, a fixed end, and a first main surface, the vibration plate being configured to vibrate in a direction perpendicular to the first main surface, a first lower electrode disposed on the first main surface of the vibration plate, a first piezoelectric layer made of piezoelectric material disposed on the first lower electrode, and a first upper electrode disposed on the first piezoelectric layer to face the first lower electrode across the first piezoelectric layer; a fixing member supporting the fixed end of the vibration plate; a first output terminal connected to the first lower electrode; and a second output terminal connected to the first upper electrode, wherein the vibration plate applies first compressive stress to the first piezoelectric layer when the vibration plate does not vibrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification