MULTIFUNCTIONAL GRAPHENE COATED SCANNING TIPS

• US 20150309073A1
• Filed: 07/12/2013
• Published: 10/29/2015
• Est. Priority Date: 07/13/2012
• Status: Abandoned Application

• Current Assignee: Northwestern University
• Original Assignee: Northwestern University
• Inventors: Mirkin, Chad A., Shim, Wooyoung, Brown, Keith A., Rasin, Boris, Liao, Xing, Zhou, Xiaozhu
• Application Number:
  US14/414,042
• Publication Number:
  US 20150309073A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G01Q 70/14 Particular materials
• CPC Class Codes: G01Q 70/16 Probe manufacture
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

A coat micro tip can include a tip having a base and an oppositely disposed tip end having a radius of curvature of less than 1 μm and a graphene film conformally coated on the tip. A method of making a graphene coated tip can include immersing a tip in a fluid comprising a graphene film floating on a surface of the fluid over the tip, disposing the immersed tip at an angle relative to the graphene film floating on the surface of the fluid as measured from a plane parallel to the base of the tip, and coating the tip with the graphene film by gradually bringing the graphene film into contact with the tip while maintaining the relative angle between the floating portion of the film and the tip during coating

Claims

1. A coated micro tip, comprising:

a micro tip having a base and an oppositely disposed tip end having a radius of curvature of less than about 1 μ

m; and

a graphene film coated on the tip.

3. A micro probe, comprising:

the micro tip of claim 1 disposed on a micro cantilever arm.

4. A tip array micro probe comprising:

a tip substrate layer comprising a first surface and an oppositely disposed second surface, the tip substrate layer comprising an elastomer;

a plurality of tips according to claim 1 fixed to the first surface, the tips each comprising a tip end disposed opposite the first surface; and

wherein the graphene film is further coated on the first surface.

5. The micro probe of claim 4, wherein the plurality of tips comprise an elastomer.

7. The tip or micro probe of claim 4, wherein the one or more tips and/or the tip substrate layer are at least translucent.

9. The micro probe of claim 4, further comprising a radiation blocking layer comprising a radiation opaque material coated on the plurality of tips and the first surface and a plurality of apertures defined in the blocking layer exposing the tip ends of the tips, the graphene film being coated on the blocking layer.

10. The micro probe of claim 4, further comprising a radiation blocking layer comprising a radiation opaque material coated on the graphene film and a plurality of apertures defined in the blocking layer exposing a portion of the graphene film disposed at the tip ends of the tips.

14. The tip of claim 1, wherein the graphene film comprises 1 to 500 layers of graphene.

15. The tip of claim 1, wherein the graphene film has a thickness in a range of about 1 nm to about 500 nm.

16. The tip of claim 1, wherein the graphene film conformally coats the at least one tip or plurality of tips.

17. A method of electrochemically patterning using at least one tip in accordance with claim 1, comprising:

applying a voltage across the graphene coating on the at least one tip; and

contacting an electrochemically sensitive substrate with the at least one tip to electrochemically desorb the contacted portion of the electrochemically sensitive substrate.

18. The method of claim 17, wherein the electrochemically sensitive substrate comprises an alkanethiolate self-assembled monolayer disposed on a gold substrate, and the method comprises contacting the micro probe to the alkanethiolate self-assembled monolayer, thereby removing the contacted portion of the alkanethiolate self-assembled monolayer, and optionally etching the gold substrate to remove portions of the gold substrate in which the alkanethiolate self-assembled monolayer was removed.

20. A method of thermal patterning using at least one tip in accordance with claim 1, comprising:

applying an electrical current across the graphene coating on the at least one tip to resistively heat at least one tip and thereby heat an ink disposed on the at least one tip; and

contacting a substrate with the heated tip to apply the ink to the substrate.

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23. A method of making one or more graphene coated micro tips, each tip having a base and an oppositely disposed tip end having a radius of curvature of less than about 1 μ

m, the method comprising;

immersing one or more tips in a fluid comprising a graphene film floating on a surface of the fluid over the one or more tips;

disposing the immersed tips at an angle of at least 10°

relative to the graphene film floating on the surface of the fluid as measured from a plane parallel to the base of the tip; and

coating the one or more tips with the graphene film by gradually bringing the graphene film into contact with the one or more tips while maintaining the relative angle between the floating portion of the film and the one or more tips during coating.

24. The method of claim 23, comprising evaporating the fluid to gradually lower the graphene film onto the one or more tips.

25. The method of claim 23, comprising raising the one or more tips through the fluid and into contact with the graphene film to thereby coat the one or more tips with the graphene film.

26. The method of claim 23, wherein the graphene film comprises a graphene film layer coated on a polymethylmethacrylate (PMMA) layer.

27. The method of claim 26, further comprising removing the PMMA layer from the one or more coated tips.

29. The method of claim 23, wherein the relative angle between tip or tips and floating graphene film is in a range of about 10°

to 50°

.

31. The method of claim 23, wherein the coating fluid comprises a mixture of water and a surfactant or a mixture of water and ethanol.

35. The method of claim 23, further comprising, before coating the one or more tips with the graphene film, coating a blocking layer on the one or more tips and forming an aperture in the blocking layer at the tip ends of the tips by removing a portion of the blocking layer to expose the tip ends, wherein coating the one or more tips with the graphene film comprises coating the blocking layer and exposed tip ends with the graphene film.

36. The method of claim 23, further comprising, after coating the one or more tips with the graphene film, coating a blocking layer on the graphene film and forming an aperture in the blocking layer at the tip ends of the tips by removing a portion of the blocking layer.

38. The method of claim 23, wherein the one or more tips are disposed on a micro cantilever or a tip substrate layer, and coating the one or more tips with the graphene film further comprises coating the one or more tips and a portion of the micro cantilever or the tip substrate layer adjacent the one or more tips.

39. The method of claim 23, further comprising forming an electrical contact on the micro probe using the graphene film.

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