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MEMS Switch

  • US 20150311003A1
  • Filed: 04/25/2014
  • Published: 10/29/2015
  • Est. Priority Date: 04/25/2014
  • Status: Active Grant
First Claim
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1. A MEMS component, comprising:

  • a substrate;

    a support;

    a movable structure;

    a control electrode;

    and the support extends from the substrate and holds a portion of the movable structure adjacent the substrate, and the movable structure overlaps with the control electrode, wherein the movable structure is delimited by an edge, and the control electrode extends past the edge of the movable structure.

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