PLACEMENT MEMBER AND METHOD OF MANUFACTURING THE SAME

• US 20150311108A1
• Filed: 11/14/2013
• Published: 10/29/2015
• Est. Priority Date: 11/28/2012
• Status: Active Grant

• Current Assignee: Kyocera Corporation
• Original Assignee: Kyocera Corporation
• Inventors: HORIUCHI, Masahiko
• Granted Patent: US 10,937,684 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: B05D 7/52 Two layers
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: H01L 21/68757 characterised by a coating or a hardness or a material

Abstract

A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).

Claims

1. A placement member comprising:

a base including a placement section on which an object is placed; and

a coating film that coats at least a part of the placement section, wherein

the placement section has a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face at the same height as the plurality of projections and surrounds the plurality of projections, and

the coating film has a first region that coats top faces of the projections, and a second region that coats a top face of the annular protrusion and has a smaller thickness than that of the first region.

2. The placement member according to claim 1, wherein

the coating film includes a first film that coats at least a part of the placement section, and a second film that coats a part of the first film,

the first region includes the first film that coats the top faces of the projections, and

the second film that coats the first film, and

the second region is composed of the first film that coats the top face of the annular protrusion.

3. The placement member according to claim 2, wherein

a thickness of the first film is smaller than a thickness of the second film.

4. The placement member according to claim 1, wherein

the coating film coats a side face of the annular protrusion, and further has a third region having a larger thickness than that of the second region.

5. The placement member according to claim 1, wherein

a difference between the first region and the second region in thickness is within the range of 1 to 3 μ

m.

6. The placement member according to claim 1, wherein

the projections and the first region constitute a support section that supports the object, and

the annular protrusion and the second region constitutes a seal section that seals a space between the object and the placement section.

7. A placement member comprising:

a base including a placement section on which an object is placed; and

a coating film that coats at least a part of the placement section, wherein

the placement section has a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face at the same height as the plurality of projections and surrounds the plurality of projections, and

the coating film has a first region that coats top faces of the projections, and allows a top face of the annular protrusion to be exposed.

8. A method of manufacturing a placement member, the method comprising:

preparing a base including a placement section on which an object is placed, the placement section having a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that surrounds the plurality of projections and protrudes from the bottom face at the same height as the plurality of projections; and

forming a coating film having a first region that coats top faces of the projections,

and a second region that coats a top face of the annular protrusion and has a smaller thickness than that of the first region on the placement section.

9. The method of manufacturing the placement member according to claim 8, wherein

the forming the coating film on the placement section includes

forming a first film that coats the top faces of the projections and the top face of the annular protrusion and then, forming a second film that coats only the first film coating the top faces of the projections out of the projections and the annular protrusion, thereby forming the coating film having the first region that includes the first film and the second film, and the second region being composed of the first film.

10. The method of manufacturing the placement member according to claim 8, wherein

the preparing the base includes

simultaneously grinding the top faces of the plurality of projections and the top face of the annular protrusion, thereby making the height of the plurality of projections equal to the height of the annular protrusion.