ANGULAR RATE SENSOR
First Claim
1. A rotation sensing device comprising a structure comprising:
- a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis;
a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams;
an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.
1 Assignment
0 Petitions
Accused Products
Abstract
A rotation sensing device is presented. The device comprises: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; and an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.
13 Citations
22 Claims
-
1. A rotation sensing device comprising a structure comprising:
-
a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A rotation sensing device comprising:
-
at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses of said at least one pair of proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; an actuation mechanism adapted to apply an electrostatic force to the proof masses to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, such that a sense-mode oscillatory movement of the proof masses is generated during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.
-
Specification