×

ANGULAR RATE SENSOR

  • US 20150316377A1
  • Filed: 07/17/2014
  • Published: 11/05/2015
  • Est. Priority Date: 07/17/2013
  • Status: Active Grant
First Claim
Patent Images

1. A rotation sensing device comprising a structure comprising:

  • a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis;

    a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams;

    an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×