MICROMECHANICAL Z-AXIS GYROSCOPE
First Claim
1. A micromechanical sensor device for measuring z-axis angular rate comprising:
- a) a substrate defining a substrate plane and a z-axis perpendicular to the substrate plane,b) at least two vibratory structures each having at least one proof mass,c) a suspension structure for suspending the two vibratory structures above the substrate for movement in drive-mode direction (x-axis) and in sense-mode direction (y-axis), wherein drive-mode direction and sense-mode direction are parallel to the substrate plane,d) at least one coupling structure connecting the two vibratory structures,e) at least one coupling support structure connecting the coupling structure to at least one anchor structure and enabling a rotational swinging movement of the coupling structure, the rotational swinging movement having an axis of rotation (z1) that is perpendicular to the substrate plane,f) wherein each of the vibratory structures comprises at least one shuttle mass coupled to the at least one proof mass by sense-mode springs, which are more flexible in sense-mode direction than in drive-mode direction (x), for activating a vibration movement of each vibratory structure,g) at least one drive electrode structure for each shuttle mass for activating drive-mode movements that are parallel to the substrate plane,h) at least one sensing electrode structure for each proof mass for detecting sense-mode movements that are parallel to the substrate plane,whereini) the coupling support structure is designed to also enable a translational movement of the coupling structure in drive-mode direction (x).
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Abstract
A micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures each having at least one proof mass. A suspension structure maintains the two vibratory structures in a mobile suspended position above the substrate for movement parallel to the substrate plane in drive-mode (x-axis) direction and in sense-mode direction (y-axis). A coupling support structure connects the coupling structure to an anchor structure and enables a rotational swinging movement of the coupling structure, the rotational swinging movement having an axis of rotation that is perpendicular to the substrate plane. Each of the vibratory structures comprises at least one shuttle mass coupled to the at least one proof mass by sense-mode springs, which are more flexible in sense-mode direction than in drive-mode direction (x), for activating a vibration movement of each vibratory structure. A sensing electrode structure for each proof mass is designed for detecting sense-mode movements that are parallel to the substrate plane, The coupling support structure is designed to also enable a translational movement of the coupling structure in drive-mode direction (x).
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Citations
20 Claims
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1. A micromechanical sensor device for measuring z-axis angular rate comprising:
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a) a substrate defining a substrate plane and a z-axis perpendicular to the substrate plane, b) at least two vibratory structures each having at least one proof mass, c) a suspension structure for suspending the two vibratory structures above the substrate for movement in drive-mode direction (x-axis) and in sense-mode direction (y-axis), wherein drive-mode direction and sense-mode direction are parallel to the substrate plane, d) at least one coupling structure connecting the two vibratory structures, e) at least one coupling support structure connecting the coupling structure to at least one anchor structure and enabling a rotational swinging movement of the coupling structure, the rotational swinging movement having an axis of rotation (z1) that is perpendicular to the substrate plane, f) wherein each of the vibratory structures comprises at least one shuttle mass coupled to the at least one proof mass by sense-mode springs, which are more flexible in sense-mode direction than in drive-mode direction (x), for activating a vibration movement of each vibratory structure, g) at least one drive electrode structure for each shuttle mass for activating drive-mode movements that are parallel to the substrate plane, h) at least one sensing electrode structure for each proof mass for detecting sense-mode movements that are parallel to the substrate plane, wherein i) the coupling support structure is designed to also enable a translational movement of the coupling structure in drive-mode direction (x). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification