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METHOD AND DEVICE FOR MEASURING A DECENTRATION AND TILT OF FACES OF AN OPTICAL ELEMENT

  • US 20150323416A1
  • Filed: 05/08/2015
  • Published: 11/12/2015
  • Est. Priority Date: 05/08/2014
  • Status: Active Grant
First Claim
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1. A method for measuring a decentration and a tilt of faces of an optical element, the method comprising:

  • registering at least all optically used and frame-relevant partial surfaces of a surface of the optical element and reference faces of the optical element over a whole area thereof and referenced to one another in a common coordinate system;

    establishing, in each case, a surface form deviation of the partial surfaces and reference faces relative to an associated intended surface stored for the optical element;

    establishing a location of the partial surfaces and the reference faces in the common coordinate system from the respective surface form deviation; and

    determining at least one tilt and at least one decentration from the location as a function of a form of the respective partial surface and reference face in the coordinate system.

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