METHOD AND DEVICE FOR MEASURING A DECENTRATION AND TILT OF FACES OF AN OPTICAL ELEMENT
First Claim
1. A method for measuring a decentration and a tilt of faces of an optical element, the method comprising:
- registering at least all optically used and frame-relevant partial surfaces of a surface of the optical element and reference faces of the optical element over a whole area thereof and referenced to one another in a common coordinate system;
establishing, in each case, a surface form deviation of the partial surfaces and reference faces relative to an associated intended surface stored for the optical element;
establishing a location of the partial surfaces and the reference faces in the common coordinate system from the respective surface form deviation; and
determining at least one tilt and at least one decentration from the location as a function of a form of the respective partial surface and reference face in the coordinate system.
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Accused Products
Abstract
A method and device for measuring a decentration and tilt of faces of an optical element is provided. At least all optically used and frame-relevant partial surfaces of a surface of the optical element and reference faces of the optical element are registered over the whole area thereof and referenced to one another in a common coordinate system, wherein in each case a surface form deviation of the partial surfaces and reference faces is established relative to an associated intended surface, wherein a location of the partial surfaces and reference faces is established in each case in the common coordinate system from the respective surface form deviation. At least one tilt and at least one decentration are established from the location as a function of a form of the respective partial surface and reference face in the coordinate system.
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Citations
11 Claims
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1. A method for measuring a decentration and a tilt of faces of an optical element, the method comprising:
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registering at least all optically used and frame-relevant partial surfaces of a surface of the optical element and reference faces of the optical element over a whole area thereof and referenced to one another in a common coordinate system; establishing, in each case, a surface form deviation of the partial surfaces and reference faces relative to an associated intended surface stored for the optical element; establishing a location of the partial surfaces and the reference faces in the common coordinate system from the respective surface form deviation; and determining at least one tilt and at least one decentration from the location as a function of a form of the respective partial surface and reference face in the coordinate system. - View Dependent Claims (2, 3, 4, 5)
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6. A device for measuring a decentration and tilt of faces of an optical element, the device comprising:
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at least one measurement unit for registering at least all optically used and frame-relevant partial surfaces of a surface of the optical element and reference faces of the optical element; and at least one evaluation unit for referencing the partial surfaces and reference faces in a common coordinate system for comparing the registered partial surfaces and reference faces with a respectively associated intended surface and for establishing a surface form deviation of the partial surfaces and reference faces, in each case relative to the associated intended surface stored for the optical element, wherein a location of the partial surfaces and reference faces in the common coordinate system is respectively establishable from the respective surface form deviation, and wherein at least one tilt and at least one decentration are establishable from the location as a function of a form of the respective partial surface and reference face in the common coordinate system. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification