PARTICLE REMOVAL SYSTEM AND METHOD THEREOF
First Claim
1. A method of removing particles from a surface of a reticle, comprising:
- placing the reticle in a carrier;
flowing a source gas into the carrier;
generating a plasma within the carrier using the source gas; and
removing particles from a surface of the reticle using the generated plasma.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of removing particles from a surface of a reticle is disclosed. The reticle is placed in a carrier, a source gas is flowed into the carrier, and a plasma is generated within the carrier. Particles are then removed from a surface of the reticle using the generated plasma. A system of removing particles from a surface includes a carrier configured to house a reticle, a reticle stocker including the carrier, a power supply configured to apply a potential between an inner cover and an inner baseplate of the carrier, and a gas source configured to flow a gas into the carrier. A plasma may be generated within the carrier, and particles can be removed from a surface of the reticle using the generated plasma. An acoustic energy source configured to agitate at least one of the source gas and the generated plasma may be provided to facilitate particle removal using an agitated plasma.
-
Citations
20 Claims
-
1. A method of removing particles from a surface of a reticle, comprising:
-
placing the reticle in a carrier; flowing a source gas into the carrier; generating a plasma within the carrier using the source gas; and removing particles from a surface of the reticle using the generated plasma. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A system for removing particles from a surface of a reticle, comprising:
-
a carrier configured to house the reticle; a reticle stocker including the carrier; a power supply configured to apply a potential between an inner cover and an inner baseplate of the carrier; and a gas source configured to flow a gas into the carrier; wherein a plasma is generated within the carrier using the gas and the applied potential; and wherein particles are removed from a surface of the reticle using the generated plasma. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
-
-
15. A method of removing particles from a surface, comprising:
-
generating a plasma using a source gas; providing an acoustic energy source configured to agitate at least one of the source gas and the generated plasma; and removing particles from the surface using an agitated plasma. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification