METHOD FOR INTERCONNECTING STACKED SEMICONDUCTOR DEVICES
First Claim
Patent Images
1. A method for making a stacked semiconductor device comprising:
- forming rims on a first die and a second die, the rims extending laterally away from the first and second dice;
stacking the second die over the first die; and
drilling one or more vias through the rims after stacking, the one or more vias extending between the first and second dice.
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Abstract
A method for making a semiconductor device includes forming rims on first and second dice. The rims extend laterally away from the first and second dice. The second die is stacked over the first die, and one or more vias are drilled through the rims after stacking. The semiconductor device includes redistribution layers extending over at least one of the respective first and second dice and the corresponding rims. The one or more vias extend through the corresponding rims, and the one or more vias are in communication with the first and second dice through the rims.
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Citations
32 Claims
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1. A method for making a stacked semiconductor device comprising:
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forming rims on a first die and a second die, the rims extending laterally away from the first and second dice; stacking the second die over the first die; and drilling one or more vias through the rims after stacking, the one or more vias extending between the first and second dice. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for making a stacked semiconductor device comprising:
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sorting dice into a plurality of operational dice, the plurality of operational dice tested for operability; and forming at least a first reconstituted dice panel including; arranging the sorted plurality of operational dice within a panel frame, and molding a resin around the plurality of operational dice within the panel frame to form the first reconstituted dice panel, rims formed with the resin extend laterally from each of the plurality operational dice. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A stacked semiconductor device comprising:
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a first die; a second die stacked over the first die; rims extending laterally away from each of the first and second dice; a first redistribution layer extending over the first die and the rim of the first die; and one or more vias extending through at least one of the respective rims, the one or more vias in communication with the first and second dice through the rims. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification