MASK-LESS FABRICATION OF VERTICAL THIN FILM BATTERIES
First Claim
1. A method of fabricating a thin film battery comprising:
- depositing a first stack of blanket layers on an electrically conductive substrate, said first stack comprising a cathode current collector layer, a cathode layer, an electrolyte layer, an anode layer and an anode current collector layer;
laser die patterning said first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery;
blanket depositing an encapsulation layer over said one or more second stacks;
laser patterning said encapsulation layer to open up contact areas to the anode current collectors on each of said one or more second stacks;
blanket depositing a metal pad layer over said encapsulation layer and said contact areas; and
laser patterning said metal pad layer to electrically isolate said anode current collectors of each of said one or more thin film batteries.
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Accused Products
Abstract
A method of fabricating a thin film battery may comprise: depositing a first stack of blanket layers on a substrate, the first stack comprising a cathode current collector, a cathode, an electrolyte, an anode and an anode current collector; laser die patterning the first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; blanket depositing an encapsulation layer over the one or more second stacks; laser patterning the encapsulation layer to open up contact areas to the anode current collectors on each of the one or more second stacks; blanket depositing a metal pad layer over the encapsulation layer and the contact areas; and laser patterning the metal pad layer to electrically isolate the anode current collectors of each of the one or more thin film batteries. For electrically non-conductive substrates, cathode contact areas are opened-up through the substrate.
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Citations
20 Claims
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1. A method of fabricating a thin film battery comprising:
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depositing a first stack of blanket layers on an electrically conductive substrate, said first stack comprising a cathode current collector layer, a cathode layer, an electrolyte layer, an anode layer and an anode current collector layer; laser die patterning said first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; blanket depositing an encapsulation layer over said one or more second stacks; laser patterning said encapsulation layer to open up contact areas to the anode current collectors on each of said one or more second stacks; blanket depositing a metal pad layer over said encapsulation layer and said contact areas; and laser patterning said metal pad layer to electrically isolate said anode current collectors of each of said one or more thin film batteries. - View Dependent Claims (2, 3, 4, 16)
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5. A method of fabricating a thin film battery comprising:
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depositing a first stack of blanket layers on the top surface of an electrically non-conductive substrate, the first stack comprising a cathode current collector layer, a cathode layer, an electrolyte layer, an anode layer and an anode current collector layer; laser die patterning said first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; blanket depositing an encapsulation layer over said one or more second stacks; laser patterning said encapsulation layer to open up anode contact areas to the anode current collectors on each of said one or more second stacks; blanket depositing a metal pad layer over said encapsulation layer and said anode contact areas; laser patterning said metal pad layer to electrically isolate the anode current collectors of each of said one or more thin film batteries; and opening up, through said substrate, cathode contact areas on the cathode current collector for each of said one or more thin film batteries. - View Dependent Claims (6, 7, 8, 9, 17, 18, 19, 20)
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10. An apparatus for fabricating thin film batteries, comprising:
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a first system for depositing a first stack of blanket layers on a substrate, said first stack comprising a cathode current collector layer, a cathode layer, an electrolyte layer, an anode layer and an anode current collector layer; a second system for laser die patterning said first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; a third system for blanket depositing an encapsulation layer over said one or more second stacks; a fourth system for laser patterning said encapsulation layer to open up anode contact areas to the anode current collectors on each of said one or more second stacks; a fifth system for blanket depositing a metal pad layer over said encapsulation layer and said anode contact areas; and a sixth system for laser patterning said metal pad layer to electrically isolate said anode current collectors of each of said one or more thin film batteries. - View Dependent Claims (11, 12, 13)
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14. (canceled)
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15. (canceled)
Specification