MASK BLANK SUBSTRATE, SUBSTRATE WITH MULTILAYER REFLECTIVE FILM, REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING MASK BLANK SUBSTRATE, METHOD OF MANUFACTURING SUBSTRATE WITH REFLECTIVE FILM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
First Claim
1. A mask blank substrate that is used in lithography, whereinthe power spectral density at a spatial frequency of 1×
- 10−
2 μ
m−
1 to 1 μ
m−
1, obtained by measuring a 0.14 mm×
0.1 mm region on a main surface of the mask blank substrate on the side of which a transfer pattern is formed at 640×
480 pixels with a white-light interferometer, is not more than 4×
106 nm4, and the power spectral density at a spatial frequency of not less than 1 μ
m31 1, obtained by measuring a 1 μ
m×
1 μ
m region on the main surface with an atomic force microscope, is not more than 10 nm4.
1 Assignment
0 Petitions
Accused Products
Abstract
An object of the present invention is to provide a mask blank substrate and the like that enables critical defects to be reliably detected as a result of reducing the number of detected defects, including pseudo defects, even when using highly sensitive defect inspection apparatuses that use light of various wavelengths. The present invention relates to a mask blank substrate that is used in lithography, wherein the power spectral density at a spatial frequency of 1×10−2 μm−1 to 1 μm−1, obtained by measuring a 0.14 mm×0.1 mm region on a main surface of the mask blank substrate on the side of which a transfer pattern is formed at 640×480 pixels with a white-light interferometer, is not more than 4×106 nm4, and the power spectral density at a spatial frequency of not less than 1 μm−1, obtained by measuring a 1 μm×1 μm region on the main surface with an atomic force microscope, is not more than 10 nm4.
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Citations
26 Claims
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1. A mask blank substrate that is used in lithography, wherein
the power spectral density at a spatial frequency of 1× - 10−
2 μ
m−
1 to 1 μ
m−
1, obtained by measuring a 0.14 mm×
0.1 mm region on a main surface of the mask blank substrate on the side of which a transfer pattern is formed at 640×
480 pixels with a white-light interferometer, is not more than 4×
106 nm4, and the power spectral density at a spatial frequency of not less than 1 μ
m31 1, obtained by measuring a 1 μ
m×
1 μ
m region on the main surface with an atomic force microscope, is not more than 10 nm4. - View Dependent Claims (2, 3, 4, 5, 6, 10, 11, 19, 20, 21, 22, 23, 24, 25)
- 10−
-
7. A substrate with a multilayer reflective film, having a multilayer reflective film, in which a high refractive index layer and a low refractive index layer are alternately laminated, on a main surface of a mask blank substrate used in lithography, wherein
the power spectral density at a spatial frequency of 1× - 10−
2 μ
m−
1 to 1 μ
m−
1, obtained by measuring a 0.14 mm×
0.1 mm region on a surface of the substrate with a multilayer reflective film on the side of which the multilayer reflective film is formed at 640×
480 pixels with a white-light interferometer, is not more than 4 ×
107 nm4, and the power spectral density at a spatial frequency of 1 μ
m−
1 to 100 μ
m−
1, obtained by measuring a 1 μ
m×
1 μ
m region on the surface of the substrate with a multilayer reflective film with an atomic force microscope, is not more than 20 nm4. - View Dependent Claims (8, 9)
- 10−
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12. A method of manufacturing a mask blank substrate, comprising a step of:
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conducting a surface processing for processing a main surface of a mask blank substrate used in lithography on the side of which a transfer pattern is formed so as to obtain a prescribed surface morphology;
wherein,the surface processing is conducted such that the power spectral density at a spatial frequency of 1×
10−
2 μ
m−
1 to 1 μ
m−
1, obtained by measuring a 0.14 mm×
0.1 mm region on the main surface at 640×
480 pixels with a white-light interferometer, is not more than 4×
106 nm4, and the power spectral density at a spatial frequency of not less than 1 μ
m−
1, obtained by measuring a 1μ
m×
1 μ
m region on the main surface with an atomic force microscope, is not more than 10 nm4. - View Dependent Claims (13, 14, 15, 16, 17, 18, 26)
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Specification