System and Method for a Capacitive Thermometer
First Claim
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1. A circuit comprising:
- a capacitive microelectromechanical system (MEMS) thermometer comprising a deflectable membrane and a sense electrode, wherein the deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.
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Abstract
Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.
8 Citations
30 Claims
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1. A circuit comprising:
a capacitive microelectromechanical system (MEMS) thermometer comprising a deflectable membrane and a sense electrode, wherein the deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A wireless device comprising:
a radio frequency (RF) circuit, the RF circuit comprising; an inductive element; and a capacitor coupled to the inductive element, wherein the capacitor comprises a capacitive thermometer with a mechanically deflectable membrane configured to adjust a capacitive value proportionally to a change in temperature. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A capacitive thermometer comprising:
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a first cavity; a second cavity formed beneath the first cavity; a third cavity formed beneath the second cavity; a deflectable membrane separating the first cavity from the second cavity, the deflectable membrane comprising a first material having a first coefficient of thermal expansion and a second material having a second coefficient of thermal expansion different from the first coefficient of thermal expansion, wherein the deflectable membrane comprises a ventilation hole; a first perforated sense electrode separating the second cavity from the third cavity, wherein the electrode is separated from the membrane by a separation distance and is capacitively coupled to the membrane; a first protective layer formed over the first cavity and sealing the first cavity; and a second protective layer formed beneath the third cavity and sealing the third cavity. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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27. A method of wirelessly determining temperature, the method comprising:
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thermally coupling a capacitive thermometer to a target medium; wirelessly exciting an RLC circuit, wherein the capacitive thermometer comprises the major capacitance of the RLC circuit; wirelessly transmitting a signal from the RLC circuit in response to the wireless exciting; and detecting the wirelessly transmitted signal from the RLC circuit. - View Dependent Claims (28, 29, 30)
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Specification