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METHOD OF MANUFACTURING A MICRO-FABRICATED WAFER LEVEL INTEGRATED INDUCTOR OR TRANSFORMER FOR HIGH FREQUENCY SWITCH MODE POWER SUPPLIES

  • US 20150340422A1
  • Filed: 05/23/2014
  • Published: 11/26/2015
  • Est. Priority Date: 05/23/2014
  • Status: Abandoned Application
First Claim
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1. An integrated magnetic device, comprising:

  • a silicon wafer substrate, an active region thereupon further comprising transistors, diodes, capacitors and resistors coupled by a conductive interconnect layer to form an active circuit, wherein the active region touches the top surface of the silicon wafer substrate and includes a first plurality of bond contacts, wherein the conductive interconnect layer is comprised of multiple layers of conductive material with insulating layer therebetween, the multiple layers of conductive material coupled together by a first plurality of vias piercing their associated insulating layer, wherein the top of the conductive interconnect layer is an insulating layer, having openings to expose a first plurality of bond contacts;

    a Silicon Nitride layer overlaying and touching the insulating layer, also having openings to expose the first plurality of bond contacts;

    a first layer of polymer deposited on top of the Silicon Nitride layer including a first plurality openings extending from the top of the first layer of polymer down to the first plurality of bond contacts;

    a first layer high conductance material, deposited on the top surface of the first layer of polymer, tilling the first plurality of openings in the first polymer layer, forming the second plurality of vias, thereby coupling the first layer of high conductance material to the first plurality of bond contacts, wherein the first layer of high conductance material is configured to form a plurality of lower coil members and also includes a second plurality of bond contacts;

    a second layer of polymer, touching the first layer of polymer and the first layer of high conductance material, wherein the top surface of the second layer of polymer is planar, the second layer of polymer include a second plurality of openings extending from the top surface of the second layer of polymer down to the second plurality of bond contacts, wherein the second plurality of openings in the second layer of polymer are filled with a third plurality of vias;

    multiple layers of alternating magnetic film material and insulating material deposited and defined on the top surface of second layer of polymer, wherein the multiple layers of alternating magnetic film material and insulating material, as defined, do not touch the third plurality of vias exposed on the top surface of the second layer of polymer;

    a third layer of polymer is deposited touching the second layer of polymer and the top of the multiple layers of alternating magnetic material and insulating material, the third layer of polymer includes a third plurality of openings extending from the top surface of the third layer of polymer down to the top surfaces of the third plurality of vias;

    a second layer high conductance material is deposited on the top surface of the third layer of polymer, wherein the second layer of high conductance material fills the third plurality of openings in the third polymer layer, forming a fourth plurality of vias, thereby coupling the second layer of high conductance material to the first plurality of bond contacts, the third layer of high conductance material is configured to form a plurality of upper coil members and also includes a third plurality of bond contacts; and

    a fourth layer of polymer is deposited touching the third layer of polymer and the top of the second layer high conductance material, wherein the fourth layer of polymer includes openings extending from the top surface of the fourth layer of polymer down to the top surfaces second layer high conductance material, the openings in the fourth layer of polymer are filled with solder balls, wherein the solder balls provide connection to outside circuitry.

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