MAGNETIC ALIGNMENT SYSTEM AND ALIGNMENT METHOD THEREFOR

• US 20150340931A1
• Filed: 01/22/2014
• Published: 11/26/2015
• Est. Priority Date: 01/25/2013
• Status: Active Grant

• Current Assignee: Shanghai Micro Electronics Equipment Company Limited
• Original Assignee: Shanghai Micro Electronics Equipment Company Limited
• Inventors: ZHANG, Lin, ZHANG, Xiaowen, CHEN, Jun, GUO, Lin, ZHANG, Zhigang
• Granted Patent: US 9,893,596 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H02K 1/22 Rotating parts of the magnetic circuit
• CPC Class Codes: H02K 11/20 for measuring, monitoring, testing, protecting or switching rectifiers H02K11/04; power electronics H02K11/33
• CPC Class Codes: H02K 15/02 of stator or rotor bodies
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: Y10T 29/49014 Superconductor

Abstract

A magnetic alignment system is disclosed, including a magnet array (10), a motor rotor (20), a fixed tooling (30) and a force sensor (40). The motor rotor (20) is disposed over the magnet array (10) and is connected via the force sensor (40) to the fixed tooling (30) that is positionally fixed relative to the magnet array (10). By varying an angle of a three-phase current supplied to a specific one of three-phase coil assemblies in the motor rotor (20) within an angular range for magnetic alignment and measuring a force generated by the specific one of three-phase coil assemblies using the force sensor (40), an angle of magnetic alignment for the specific one of three-phase coil assemblies is determinable based on the angle of three-phase current that causes the specific one of three-phase coil assemblies to generate a maximum force.

Claims

1. A magnetic alignment system, comprising:

a magnet array configured to produce a magnetic field;

a motor rotor disposed over the magnet array, wherein;

the motor rotor comprises four coil assemblies arranged in a matrix, and among each two adjacent ones of the four coil assemblies, one is oriented along a first direction and the other is oriented along a second direction perpendicular to the first direction;

a fixed tooling fixed in position with respect to the magnet array; and

a force sensor unit connected between the motor rotor and the fixed tooling, wherein the force sensor unit is configured to, in the event of one of the four coil assemblies being supplied with a three-phase current, measure a force generated by the one of the four coil assemblies under an effect of the magnetic field.

2. The magnetic alignment system of claim 1, wherein each of the four coil assemblies comprises a plurality of three-phase coils arranged in parallel.

3. The magnetic alignment system of claim 2, wherein the magnet array comprises a plurality of magnets arranged along third and fourth directions in a matrix, the third and fourth directions being perpendicular to each other, the third direction forming an angle of 45 degrees with the first direction, the fourth direction forming an angle of 45 degrees with the second direction.

4. The magnetic alignment system of claim 3, wherein in each of the four coil assemblies, each two adjacent ones of the three-phase coils are spaced by a distance of 4τ

/3, where τ

represents a pole pitch of two adjacent ones of the magnets in the magnet array.

5. The magnetic alignment system of claim 1, wherein the force sensor unit comprises a more than three-dimensional force sensor.

6. The magnetic alignment system of claim 1, wherein the force sensor unit comprises three one-dimensional force sensors.

7. The magnetic alignment system of claim 1, wherein the fixed tooling is not in contact either with the rotor or with the magnet array.

8. A magnetic alignment method, comprising:

providing a magnet array configured to produce a magnetic field;

providing a motor rotor disposed over the magnet array, wherein;

the motor rotor comprises four coil assemblies arranged in a matrix, and among each two adjacent ones of the four coil assemblies, one is oriented along a first direction and the other is oriented along a second direction perpendicular to the first direction;

mounting a fixed tooling in a fixed position with respect to the magnet array; and

connecting a force sensor unit between the motor rotor and the fixed tooling, and performing an initial magnetic alignment process on each of the four coil assemblies, the initial magnetic alignment process comprising;

varying an angle of a three-phase current supplied to one of the four coil assemblies within an angular period for magnetic alignment and measuring a horizontal or vertical force generated by the one of the four coil assemblies using the force sensor unit; and

determining an angle of magnetic alignment for the one of the four coil assemblies based on the angle of the three-phase current that causes the one of the four coil assemblies to generate a maximum horizontal or vertical force.

9. The magnetic alignment method of claim 8, further comprising:

removing the fixed tooling and the force sensor unit and servo-correcting the angle of magnetic alignment on each of the four coil assemblies, comprising;

removing one of the four coil assemblies from an initial closed-loop control, causing the other three of the four coil assemblies to form a new closed-loop control under a control of a controller, and recording an output of the controller at this time as an initial offset value;

supplying a three-phase current to the one of the four coil assemblies, varying an angle of the three-phase current, and recording an output of the controller at this time as an actual output; and

adjusting the angle of the three-phase current supplied to the one of the four coil assemblies to a value resulting in the actual output closest to the initial offset value.

10. The magnetic alignment method of claim 9, wherein the angle of the three-phase current is adjusted by varying the angle within a range from an initial angle of magnetic alignment plus −

1/N of an angular period for magnetic alignment to the initial angle of magnetic alignment plus 1/N of the angular period for magnetic alignment, where N is a natural number.

11. The magnetic alignment method of claim 8, wherein the fixed tooling is not in contact either with the rotor or with the magnet array.