ELECTROMAGNETIC CHUCK FOR OLED MASK CHUCKING
First Claim
Patent Images
1. A processing system comprising:
- a process chamber configured to deposit a material on the substrate; and
an electromagnetic mask chuck positioned in the process chamber, the electromagnetic mask chuck comprising;
a plurality of electromagnets operable to chuck a mask to the substrate on the substrate carrier; and
a power source coupled to the plurality of electromagnets.
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Accused Products
Abstract
An electromagnetic mask chuck is described herein. The electromagnetic mask chuck includes a body with a plurality of electromagnets formed therein. The electromagnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition. The electromagnets are controlled using a power source, to deliver a controlled magnetic field to the mask.
8 Citations
20 Claims
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1. A processing system comprising:
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a process chamber configured to deposit a material on the substrate; and an electromagnetic mask chuck positioned in the process chamber, the electromagnetic mask chuck comprising; a plurality of electromagnets operable to chuck a mask to the substrate on the substrate carrier; and a power source coupled to the plurality of electromagnets. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A substrate carrier for use in a process chamber, the substrate carrier comprising:
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a support base configured to transport a substrate into and out of the processing chamber, the support base having a substrate supporting surface; and an electromagnetic mask chuck coupled to the support base, the electromagnetic mask chuck comprising a plurality of electromagnets operable to chuck a mask to the substrate through the substrate carrier. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A method for chucking a mask in a process chamber, the method comprising:
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transferring a substrate disposed on a substrate supporting surface of a substrate carrier into a processing position in a process chamber; electromagnetically chucking a mask to the substrate disposed on the substrate carrier; and depositing a layer through the mask onto the substrate. - View Dependent Claims (17, 18, 19, 20)
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Specification