SYSTEM FOR DRIVING AN ARRAY OF MEMS STRUCTURES AND CORRESPONDING DRIVING METHOD
First Claim
1. A system to drive a MEMS array, the system comprising:
- a plurality of row driving stages coupled to the MEMS array, the MEMS array having a plurality of MEMS structures that each have a row terminal and a column terminal, each of the plurality of row driving stages being configured to supply row-biasing signals to the row terminal of each MEMS structure associated with a respective row;
a plurality of column driving stages coupled to the MEMS array, each of the plurality of column driving stages being configured to supply column-biasing signals to the column terminal of each MEMS structure associated with a respective column; and
a control unit configured to supply row-address signals to said row driving stages to generate the row-biasing signals and to supply column-address signals to said column driving stages to generate the column-biasing signals,the control unit being configured to further supply row-deactivation and column-deactivation signals to one or more of said row and column driving stages to cause deactivation of one or more rows and columns of said MEMS array.
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Accused Products
Abstract
A system for driving a MEMS array having a number of MEMS structures, each defining at least one row terminal and one column terminal, envisages: a number of row driving stages, each for supplying row-biasing signals to the row terminal of each MEMS structure associated to a respective row; a number of column driving stages, each for supplying column-biasing signals to the column terminal of each MEMS structure associated to a respective column; and a control unit, for supplying row-address signals to the row driving stages for generation of the row-biasing signals and for supplying column-address signals to the column driving stages for generation of the column-biasing signals. The control unit further supplies row-deactivation and/or column-deactivation signals to one or more of the row and column driving stages, for causing deactivation of one or more rows and/or columns of the MEMS array.
11 Citations
25 Claims
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1. A system to drive a MEMS array, the system comprising:
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a plurality of row driving stages coupled to the MEMS array, the MEMS array having a plurality of MEMS structures that each have a row terminal and a column terminal, each of the plurality of row driving stages being configured to supply row-biasing signals to the row terminal of each MEMS structure associated with a respective row; a plurality of column driving stages coupled to the MEMS array, each of the plurality of column driving stages being configured to supply column-biasing signals to the column terminal of each MEMS structure associated with a respective column; and a control unit configured to supply row-address signals to said row driving stages to generate the row-biasing signals and to supply column-address signals to said column driving stages to generate the column-biasing signals, the control unit being configured to further supply row-deactivation and column-deactivation signals to one or more of said row and column driving stages to cause deactivation of one or more rows and columns of said MEMS array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for driving a MEMS array including a plurality of MEMS structures, each defining at least one row terminal and one column terminal, said method comprising:
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supplying, by a plurality of row driving stages associated with said MEMS array, row-biasing signals to the row terminal of each MEMS structure associated with a respective row; supplying, by a plurality of column driving stages associated with said MEMS array, column-biasing signals to the column terminal of each MEMS structure associated with a respective column; and generating the row-biasing signals and column-address signals to the column driving stages for generation of the column-biasing signals by supplying, by a control unit, row-address signals to said row driving stages; and causing deactivation of one or more rows and/or columns of said MEMS array by supplying row-deactivation or column-deactivation signals to one or more of said row and column driving stages. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification