METHODS AND APPARATUS TO REDUCE SHOCK IN A SLIT VALVE DOOR
First Claim
1. A slit valve assembly, comprising:
- a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls;
a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the substrate transfer port; and
a bumper assembly disposed on an edge of at least one face of the slit valve door, the bumper assembly comprising a first bumper member made of a first material and a second bumper made of a second material that is different than the first material.
1 Assignment
0 Petitions
Accused Products
Abstract
Embodiments disclosed herein generally relate to apparatus and methods for sealing a vacuum chamber with a slit valve assembly that in one embodiment includes a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls, a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the substrate transfer port, and a bumper assembly disposed on an edge of at least one face of the slit valve door, the bumper assembly comprising a first bumper member made of a first material and a second bumper made of a second material that is different than the first material.
-
Citations
20 Claims
-
1. A slit valve assembly, comprising:
-
a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls; a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the substrate transfer port; and a bumper assembly disposed on an edge of at least one face of the slit valve door, the bumper assembly comprising a first bumper member made of a first material and a second bumper made of a second material that is different than the first material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A slit valve assembly, comprising:
-
a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls; a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the substrate transfer port; an actuator coupled to the slit valve door and operable to move the slit valve door between the open and closed positions; and a bumper assembly disposed on parallel edges of at least one face of the slit valve door, the bumper assembly comprising a first bumper member made of a first material and a second bumper made of a second material that is different than the first material. - View Dependent Claims (10, 11, 12, 13, 14)
-
-
15. A slit valve assembly, comprising:
-
a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls; a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the substrate transfer port; and a plurality of first bumper members and a plurality of second bumper members disposed on an edge of at least one face of the slit valve door along a longitudinal axis of the slit valve door. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification