MULTI-AXIS SENSOR
First Claim
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1. A multi-axis sensor, comprising:
- a first sensor embedded in an embedded substrate and configured to sense a position; and
a second sensor formed on a lower cap substrate bonded on the embedded substrate by a wafer level package scheme and configured to sense an inertial force.
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Abstract
Embodiments of the invention provide a multi-axis sensor, including a first sensor embedded in an embedded substrate to sense a position, and a second sensor formed on a lower cap substrate bonded on the embedded substrate by a wafer level package scheme to sense an inertial force.
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Citations
17 Claims
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1. A multi-axis sensor, comprising:
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a first sensor embedded in an embedded substrate and configured to sense a position; and a second sensor formed on a lower cap substrate bonded on the embedded substrate by a wafer level package scheme and configured to sense an inertial force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification