ELECTRICAL TUNING OF PARAMETERS OF PIEZOELECTRIC ACTUATED TRANSDUCERS
First Claim
1. A piezoelectric actuated transducer, comprising:
- a piezoelectric layer deposited on a silicon supporting layer;
a first electrode layer deposited on the piezoelectric layer; and
a second electrode layer deposited between the silicon supporting layer and the piezoelectric layer, wherein at least a portion of the first electrode layer and the second electrode layer are coupled to a direct current voltage source to facilitate electrical tuning of a resonant frequency of the piezoelectric actuated transducer.
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Accused Products
Abstract
Parameters, such as, quality factor and/or resonance frequency of an acoustic transducer can be electrically tuned. The acoustic transducer can include a piezoelectric layer deposited on a silicon supporting layer, a first electrode layer deposited on the piezoelectric layer, and a second electrode layer deposited between the silicon supporting layer and piezoelectric layer. In one aspect, a resonant frequency of the piezoelectric actuated transducer is electrically tuned based on modifying a voltage across at least a portion of the first electrode layer and the second electrode layer. In another aspect, a quality factor of the piezoelectric actuated transducer is electrically tuned based on modifying a resistance across at least another portion of the first electrode layer and the second electrode layer.
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Citations
31 Claims
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1. A piezoelectric actuated transducer, comprising:
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a piezoelectric layer deposited on a silicon supporting layer; a first electrode layer deposited on the piezoelectric layer; and a second electrode layer deposited between the silicon supporting layer and the piezoelectric layer, wherein at least a portion of the first electrode layer and the second electrode layer are coupled to a direct current voltage source to facilitate electrical tuning of a resonant frequency of the piezoelectric actuated transducer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A piezoelectric actuated transducer, comprising:
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a piezoelectric layer deposited on a silicon supporting layer; a first electrode layer deposited on the piezoelectric layer; and a second electrode layer deposited between the silicon supporting layer and the piezoelectric layer, wherein at least a portion of the first electrode layer and the second electrode layer are coupled to a resistor to facilitate electrical tuning of a quality factor of the piezoelectric actuated transducer. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method, comprising:
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depositing a piezoelectric layer on a silicon supporting layer; forming a first electrode layer on the piezoelectric layer and a second electrode layer between the silicon supporting layer and the piezoelectric layer to form a piezoelectric actuated transducer; and tuning a resonant frequency of the piezoelectric actuated transducer based on controlling a voltage signal across at least a portion of the first electrode layer and the second electrode layer. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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30. A biometric sensing method, comprising:
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transmitting an ultrasonic signal by an acoustic sensing element having a voltage source coupled across a first electrode that is deposited on a piezoelectric layer and a second electrode that is deposited below the piezoelectric layer; sensing, by the piezoelectric layer, an interference signal that is generated based on an interference of the ultrasonic signal with an object; and controlling a voltage of the voltage source to tune a resonant frequency of the piezoelectric layer. - View Dependent Claims (31)
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Specification