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ELECTRICAL TUNING OF PARAMETERS OF PIEZOELECTRIC ACTUATED TRANSDUCERS

  • US 20150358740A1
  • Filed: 06/04/2014
  • Published: 12/10/2015
  • Est. Priority Date: 06/04/2014
  • Status: Abandoned Application
First Claim
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1. A piezoelectric actuated transducer, comprising:

  • a piezoelectric layer deposited on a silicon supporting layer;

    a first electrode layer deposited on the piezoelectric layer; and

    a second electrode layer deposited between the silicon supporting layer and the piezoelectric layer, wherein at least a portion of the first electrode layer and the second electrode layer are coupled to a direct current voltage source to facilitate electrical tuning of a resonant frequency of the piezoelectric actuated transducer.

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