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Microelectromechanical system and method for manufacturing a microelectromechanical system

  • US 20150360934A1
  • Filed: 06/16/2015
  • Published: 12/17/2015
  • Est. Priority Date: 06/17/2014
  • Status: Abandoned Application
First Claim
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1. A microelectromechanical system, comprising:

  • a microelectromechanical element; and

    a substrate;

    wherein an element surface of the element and a substrate surface of the substrate is integrally joined with the aid of an eutectic alloy at at least one joint.

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