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Wafer Scale Monolithic CMOS-Integration of Free- and non-Free-Standing Metal- and Metal alloy-based MEMS Structures in a Sealed Cavity

  • US 20150360936A1
  • Filed: 06/16/2014
  • Published: 12/17/2015
  • Est. Priority Date: 06/16/2014
  • Status: Active Grant
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1-32. -32. (canceled)

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