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Scalable CVD Film and Nanomaterial Synthesis

  • US 20150361549A1
  • Filed: 06/09/2015
  • Published: 12/17/2015
  • Est. Priority Date: 06/13/2014
  • Status: Active Grant
First Claim
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1. A method for large area production of CVD-processed materials, the method comprising the steps of:

  • a) positioning a first remounted substrate roll into the primary reaction chamber of a batch process chemical vapor deposition synthesis system, said roll being formed of i) an extended first substrate having a width W, a length L and a thickness T, wherein T<

    <

    W<

    <

    L, and ii) at least two outer spacer strips, and wherein said first substrate is wound in its length direction in such a manner that said outer spacer strips are inserted between each consecutive layer of said roll and located near the edges of said width of said substrate;

    b) processing said roll via chemical vapor deposition, said outer spacer strips being formed of a material which is substantially open thus permitting substantially uninhibited process gas exchange between the internal and external volume of said roll; and

    c) removing said roll from said process chamber after completion of said chemical vapor deposition process.

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