FUNCTIONAL ELEMENT, METHOD OF MANUFACTURING FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOBILE OBJECT
First Claim
1. A functional element comprising:
- a first base body;
a coupling section which is coupled to the first base body;
a support body which extends from the coupling section;
a mass body which is coupled to the support body;
a drive electrode which is provided on a surface side that faces the mass body of the first base body;
a detection working electrode which extends from the support body; and
a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode,wherein the mass body can be displaced in a direction which intersects a main surface of the mass body, andwherein, when a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>
d2 is satisfied.
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Accused Products
Abstract
A functional element includes a first base body; a coupling section which is coupled to the first base body; a support body which extends from the coupling section; a mass body which is coupled to the support body; a drive electrode which is provided on a surface side that faces the mass body; a detection working electrode which extends from the support body; and a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode. The mass body can be displaced in a direction which intersects a main surface of the mass body. When a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>d2 is satisfied.
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Citations
20 Claims
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1. A functional element comprising:
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a first base body; a coupling section which is coupled to the first base body; a support body which extends from the coupling section; a mass body which is coupled to the support body; a drive electrode which is provided on a surface side that faces the mass body of the first base body; a detection working electrode which extends from the support body; and a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode, wherein the mass body can be displaced in a direction which intersects a main surface of the mass body, and wherein, when a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>
d2 is satisfied. - View Dependent Claims (2, 3, 4, 5, 6, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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7. A method of manufacturing a functional element, comprising:
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forming a second concave section in a second base body by processing the second base body; disposing a drive electrode on a first base body; bonding together a surface having the second concave section which is provided in the second base body and a surface having the drive electrode of the first base body; and forming a coupling section, a support body, a mass body, a detection working electrode, and a detection fixed electrode by processing the second base body, wherein, the forming of the coupling section, the support body, the mass body, the detection working electrode, and the detection fixed electrode includes forming the mass body in the second concave section. - View Dependent Claims (8)
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Specification