MEMS DEVICE CALIBRATION
First Claim
Patent Images
1. A MEMS device, comprising:
- a cavity having an internal environment;
a seal isolating the internal environment from an external environment outside the MEMS device;
wherein the seal is susceptible to damage in response to a calibration unsealing energy;
wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and
a calibration circuit capable of measuring the internal environment before and after damage to the seal.
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Accused Products
Abstract
One example discloses a MEMS device, including: a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal.
16 Citations
23 Claims
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1. A MEMS device, comprising:
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a cavity having an internal environment; a seal isolating the internal environment from an external environment outside the MEMS device; wherein the seal is susceptible to damage in response to a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; and a calibration circuit capable of measuring the internal environment before and after damage to the seal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method calibrating a MEMS device having a seal isolating an internal environment within the MEMS device from an external environment outside the MEMS device, comprising:
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measuring a parameter of the internal environment within the MEMS device before damage to the seal; damaging the seal with a calibration unsealing energy; wherein upon damage to the seal, a pathway forms which couples the internal environment to the external environment; measuring a parameter of the internal environment after damage to the seal; and calibrating the MEMS device based on the measuring. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification