MEMS DEVICE
First Claim
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1. A MEMS device comprising:
- a movable section;
a beam connected to the movable section;
a frame connected to the beam; and
a substrate including a fixed electrode and an extended electrode, and connected to the frame,wherein the fixed electrode is formed on the substrate in at least a part of a region facing the movable section, andthe extended electrode is connected to the fixed electrode, and formed on the substrate in at least a part of a region facing the beam.
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Abstract
A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.
5 Citations
12 Claims
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1. A MEMS device comprising:
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a movable section; a beam connected to the movable section; a frame connected to the beam; and a substrate including a fixed electrode and an extended electrode, and connected to the frame, wherein the fixed electrode is formed on the substrate in at least a part of a region facing the movable section, and the extended electrode is connected to the fixed electrode, and formed on the substrate in at least a part of a region facing the beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification