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MEMS DEVICE

  • US 20150368089A1
  • Filed: 02/03/2014
  • Published: 12/24/2015
  • Est. Priority Date: 02/06/2013
  • Status: Active Grant
First Claim
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1. A MEMS device comprising:

  • a movable section;

    a beam connected to the movable section;

    a frame connected to the beam; and

    a substrate including a fixed electrode and an extended electrode, and connected to the frame,wherein the fixed electrode is formed on the substrate in at least a part of a region facing the movable section, andthe extended electrode is connected to the fixed electrode, and formed on the substrate in at least a part of a region facing the beam.

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