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DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

  • US 20150369752A1
  • Filed: 01/16/2014
  • Published: 12/24/2015
  • Est. Priority Date: 01/31/2013
  • Status: Active Grant
First Claim
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1. A defect inspection method, comprising:

  • imaging with an image acquiring unit the same region of a sample in a plurality of image acquisition conditions and acquiring a plurality of images for the same region of the sample;

    processing with a defect candidate extracting unit the plurality of acquired images of the sample and extracting a defect candidate in each of the plurality of images;

    clipping with a partial image clipping unit a partial image including the extracted defect candidate and a neighboring image of the defect candidate from the plurality of acquired images based on position information of the extracted defect candidate;

    obtaining with a feature quantity calculating unit feature quantities of the defect candidates in the plurality of clipped partial images;

    associating with a defect candidate associating unit the defect candidates that have the same coordinates and are detected in conditions in which the image acquisition condition is different among the extracted defect candidate;

    extracting with a defect extracting unit defect from among the associated defect candidates based on multi-dimensional feature quantity space data of feature quantities of the associated defect candidates; and

    outputting with an output unit information of the extracted defect.

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