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SAMPLE OBSERVATION APPARATUS AND METHOD FOR GENERATING OBSERVATION IMAGE OF SAMPLE

  • US 20150371368A1
  • Filed: 06/02/2015
  • Published: 12/24/2015
  • Est. Priority Date: 06/19/2014
  • Status: Active Grant
First Claim
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1. A sample observation apparatus comprising:

  • a storage section that stores information about an S/N ratio required in a raw image for generating a super-resolution image;

    a number-of-image-data-sets calculator that calculates a number of image data sets to be added together for generating the raw image based on the S/N-ratio information stored in the storage section and a predetermined image acquisition condition;

    an image-data acquisition section that acquires the image data by detecting light from a sample with the predetermined image acquisition condition;

    a controller that causes the image-data acquisition section to acquire multiple sets of the image data of the same region of the sample by making the image-data acquisition section repeatedly detect light from the same region based on the number calculated by the number-of-image-data-sets calculator; and

    a raw-image generator that adds together the multiple sets of image data of the same region acquired by the image-data acquisition section so as to generate the raw image.

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