MICROELECTROMECHANICAL SYSTEMS DEVICES WITH IMPROVED LATERAL SENSITIVITY
First Claim
Patent Images
1. A microelectromechanical systems (MEMS) device comprising:
- a substrate;
an anchored structure fixedly coupled to the substrate; and
a movable structure resiliently coupled to the substrate, the movable structure having an opening formed therethrough and being positioned such that the anchored structure is at least partially within the opening and is in a capacitor-forming relationship with the movable structure, wherein the movable structure comprises a movable structure finger extending only partially across the opening.
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Abstract
Microelectromechanical system (MEMS) devices and methods for forming MEMS devices are provided. The MEMS devices include a substrate, an anchored structure fixedly coupled to the substrate, and a movable structure resiliently coupled to the substrate. The movable structure has an opening formed therethrough and is positioned such that the anchored structure is at least partially within the opening and is in a capacitor-forming relationship with the movable structure. The movable structure comprises a movable structure finger extending only partially across the opening.
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Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a substrate; an anchored structure fixedly coupled to the substrate; and a movable structure resiliently coupled to the substrate, the movable structure having an opening formed therethrough and being positioned such that the anchored structure is at least partially within the opening and is in a capacitor-forming relationship with the movable structure, wherein the movable structure comprises a movable structure finger extending only partially across the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a first anchored structure fixedly coupled to the substrate and comprising a first anchored structure finger; a second anchored structure fixedly coupled to the substrate and comprising a second anchored structure finger; and a movable structure resiliently coupled to the substrate, the movable structure having an opening formed therethrough and being positioned such that the first anchored structure and the second anchored structure are at least partially within the opening and are laterally surrounded by the movable structure, wherein the movable structure comprises; a first movable structure finger extending only partially across the opening and being in a capacitor-forming relationship with the first anchored structure finger; and a second movable structure finger extending only partially across the opening and being in a capacitor-forming relationship with the second anchored structure finger. - View Dependent Claims (12, 13, 14, 15)
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16. A method for determining a force with a microelectromechanical (MEMS) system device, the method comprising:
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detecting a change in capacitance between an anchored structure fixedly coupled to a substrate and a finger of a movable structure resiliently coupled to the substrate, the movable structure having an opening and being positioned such that the anchored structure is at least partially within the opening, the finger of the movable structure extending only partially across the opening; and determining the force based on the detected change in capacitance. - View Dependent Claims (17, 18, 19, 20)
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Specification