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MICROELECTROMECHANICAL SYSTEMS DEVICES WITH IMPROVED LATERAL SENSITIVITY

  • US 20150375989A1
  • Filed: 06/27/2014
  • Published: 12/31/2015
  • Est. Priority Date: 06/27/2014
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:

  • a substrate;

    an anchored structure fixedly coupled to the substrate; and

    a movable structure resiliently coupled to the substrate, the movable structure having an opening formed therethrough and being positioned such that the anchored structure is at least partially within the opening and is in a capacitor-forming relationship with the movable structure, wherein the movable structure comprises a movable structure finger extending only partially across the opening.

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