METHOD FOR PRODUCING TITANIUM-DOPED SYNTHETIC QUARTZ GLASS
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Abstract
A method for producing titanium-doped synthetic quartz glass includes:
- (A) providing a liquid SiO2 feedstock material that comprises more than 60% by weight of the polyalkylsiloxane D4;
- (B) evaporating the liquid SiO2 feedstock material to produce a gaseous SiO2 feedstock vapor;
- (C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor;
- (D) converting the SiO2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively;
- (E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO2 soot body;
- (F) vitrifying the titanium-doped SiO2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight.
The liquid SiO2 feedstock material comprises at least one additional component made of the polyalkylsiloxane D3 having a weight fraction of mD3 and one additional component made of the polyalkylsiloxane D5 having a weight fraction of mD5 at a weight ratio of mD3/mD5 in a range of 0.01 to 1, and the liquid SiO2 feedstock material provided is evaporated while maintaining the weight ratio of mD3/mD5 and at least 99% by weight thereof are evaporated to form the gaseous SiO2 feedstock vapor.
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Citations
35 Claims
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1-15. -15. (canceled)
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16. A method for producing titanium-doped synthetic quartz glass comprising:
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(A) providing a liquid SiO2 feedstock material comprising more than 60% by weight of the polyalkylsiloxane D4; (B) evaporating the liquid SiO2 feedstock material to produce a gaseous SiO2 feedstock vapor; (C) evaporating a liquid TiO2 feedstock material to produce a gaseous TiO2 feedstock vapor; (D) converting the SiO2 feedstock vapor and the TiO2 feedstock vapor into SiO2 particles and TiO2 particles, respectively; (E) depositing the SiO2 particles and the TiO2 particles on a deposition surface while forming a titanium-doped SiO2 soot body; (F) vitrifying the titanium-doped SiO2 soot body while forming the synthetic quartz glass, whereby the TiO2 concentration of the synthetic quartz glass is between 5% by weight and 11% by weight; wherein the liquid SiO2 feedstock material comprises at least one additional component made of the polyalkylsiloxane D3 having a weight fraction of mD3 and one additional component made of the polyalkylsiloxane D5 having a weight fraction of mD5 at a weight ratio of mD3/mD5 in a range of 0.01 to 1, and the liquid SiO2 feedstock material provided is evaporated while maintaining the weight ratio of mD3/mD5 and at least 99% by weight thereof are evaporated to form the gaseous SiO2 feedstock vapor. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification