ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING

• US 20150376792A1
• Filed: 06/30/2014
• Published: 12/31/2015
• Est. Priority Date: 06/30/2014
• Status: Abandoned Application

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Spurlin, Tighe A., Antonelli, George Andrew, Reid, Jonathan D., Porter, David
• Application Number:
  US14/320,171
• Publication Number:
  US 20150376792A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23C 18/1803 of metallic material surfaces or of a non-specific material surfaces
• CPC Class Codes: C23C 18/38 Coating with copper
• CPC Class Codes: C25D 3/38 of copper
• CPC Class Codes: C25D 5/34 Pretreatment of metallic surfaces to be electroplated
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer
• CPC Class Codes: H01J 37/32348 Dielectric barrier discharge
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32596 Hollow cathodes
• CPC Class Codes: H01J 37/32825 Working under atmospheric pressure or higher
• CPC Class Codes: H01L 21/02068 during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
• CPC Class Codes: H01L 21/67161 characterized by the layout of the process chambers
• CPC Class Codes: H01L 21/76843 formed in openings in a dielectric
• CPC Class Codes: H01L 21/76862 Bombardment with particles, e.g. treatment in noble gas plasmas; UV irradiation
• CPC Class Codes: H01L 21/76873 for electroplating

Abstract

Method and apparatus for treating a substrate prior to deposition using atmospheric plasma are disclosed. A substrate can be provided between a substrate support and a plasma distributor, where the plasma distributor includes one or more atmospheric plasma sources. The atmospheric plasma sources can generate plasma under atmospheric pressure, where the plasma can include radicals and ions of a process gas, such as a reducing gas species. The substrate can be exposed to the plasma under atmospheric pressure to treat the surface of the substrate, where atmospheric pressure can be between about 50 Torr and about 760 Torr. In some embodiments, substrate includes a metal seed layer having portions converted to oxide of a metal, where exposure to the plasma reduces the oxide of the metal and reflows the metal in the metal seed layer.

Claims

1. An apparatus for treating a substrate prior to deposition using atmospheric plasma, the apparatus comprising:

a substrate support for supporting a substrate;

a plasma distributor over the substrate support for delivering plasma to the surface of the substrate, the plasma distributor including one or more atmospheric plasma sources configured to generate the plasma; and

a controller with instructions for performing the following operations;

(a) providing the substrate between the substrate support and the plasma distributor;

(b) forming the plasma under atmospheric pressure; and

(c) exposing the substrate to the plasma under atmospheric pressure to treat the surface of the substrate, wherein atmospheric pressure is between about 50 Torr and about 760 Torr.

2. The apparatus of claim 1, wherein the substrate support and the plasma distributor are configured to provide the substrate at a distance of between about 0.1 mm and about 10 mm from the plasma distributor during operations (a)-(c).

3. The apparatus of claim 1, further comprising a pulse generator coupled to the one or more plasma sources.

4. The apparatus of claim 1, wherein operation (a) comprises providing the substrate with a metal seed layer formed thereon, a portion of the metal seed layer having been converted to oxide of the metal, and wherein operation (c) comprises exposing the metal seed layer of the substrate to the plasma under conditions that reduce the oxide of the metal and reflow the metal in the metal seed layer.

5. The apparatus of claim 1, wherein the metal seed layer includes a copper seed layer having a thickness between about 40 Å

and about 80 Å

.

6. The apparatus of claim 1, wherein the controller further comprises instructions for:

after exposing the substrate to the plasma, transferring the substrate to a plating bath containing a plating solution.

7. The apparatus of claim 6, wherein the apparatus is configured for transferring the substrate occurs under atmospheric pressure and temperature.

8. The apparatus of claim 1, wherein the apparatus is configured to form the plasma at a temperature of less than about 75°

C.

9. The apparatus of claim 1, further comprising a processing chamber, wherein the apparatus is configured to perform operations (b) and (c) within the processing chamber.

10. The apparatus of claim 1, where the one or more plasma sources include a plurality of plasma jets.

11. The apparatus of claim 1, wherein the one or more plasma sources are configured to form a dielectric barrier discharge.

12. The apparatus of claim 1, wherein the one or more plasma sources include a plurality of hollow cathodes.

13. The apparatus of claim 1, wherein the apparatus is configured to produce the plasma from a forming gas, the forming gas including hydrogen and nitrogen gas.

14. The apparatus of claim 1, wherein the controller further comprises instructions for:

before exposing the substrate to the plasma, delivering a blanket of inert gas between the plasma distributor and the substrate.

15. The apparatus of claim 1, wherein the apparatus is configured such that the plasma includes radicals and ions of a reducing gas species including at least one of hydrogen and ammonia.

16. The apparatus of claim 1, wherein the plasma distributor comprises a ceramic body and a metal electrode below the ceramic body.

17. The apparatus of claim 1, further comprising a showerhead disposed between the plasma distributor and the substrate, the showerhead including a plurality of holes.

18. A method of treating a substrate prior to deposition with an atmospheric plasma, the method comprising:

providing a substrate between a substrate support and one or more atmospheric plasma sources;

providing a process gas to the one or more atmospheric plasma sources;

forming a plasma under atmospheric pressure in the one or more atmospheric plasma sources, the plasma including radicals and ions of the process gas; and

exposing the substrate to the plasma under atmospheric pressure to treat the surface of the surface of the substrate, wherein atmospheric pressure is between about 50 Torr and about 760 Torr.

19. The method of claim 18, wherein providing the substrate comprises providing the substrate at a distance of between about 0.1 mm and about 10 mm below the one or more atmospheric plasma sources.

20. The method of claim 18, wherein providing the substrate comprises providing the substrate with a metal seed layer formed thereon, a portion of the metal seed layer having been converted to oxide of the metal, and wherein exposing the substrate to the plasma comprises exposing the metal seed layer of the substrate to the plasma under conditions that reduce the oxide of the metal and reflows the metal in the metal seed layer.

21. The method of claim 18, wherein forming the plasma includes forming the plasma at a temperature of less than about 75°

C.

22. The method of claim 18, further comprising:

after exposing the substrate to the plasma, transferring the substrate to a plating bath containing a plating solution.

23. The method of claim 18, wherein the plasma includes radicals and ions of a reducing gas species including at least one of hydrogen and ammonia.

24. The method of claim 18, further comprising:

applying a pulse of greater than about 5,000 V to the one or more atmospheric plasma sources to form the plasma.