MICRO-ELECTRO-MECHANICAL DEVICE WITH COMPENSATION OF ERRORS DUE TO DISTURBANCE FORCES, SUCH AS QUADRATURE COMPONENTS
First Claim
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1. A MEMS device comprising:
- a substrate;
first elastic elements; and
a movable mass system including;
a suspended mass elastically coupled to the substrate by the first elastic elements and subject to disturbance forces along a vibration direction; and
a dynamic absorber elastically coupled to the suspended mass and configured to reduce movements of the suspended mass due to the disturbance forces.
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Abstract
MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.
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Citations
20 Claims
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1. A MEMS device comprising:
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a substrate; first elastic elements; and a movable mass system including; a suspended mass elastically coupled to the substrate by the first elastic elements and subject to disturbance forces along a vibration direction; and a dynamic absorber elastically coupled to the suspended mass and configured to reduce movements of the suspended mass due to the disturbance forces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An electronic device comprising:
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a controller; an input/output device coupled to the controller; and a MEMS device coupled to the controller, the MEMS device including; a substrate; first and second elastic elements; and a movable mass system including; a suspended mass elastically coupled to the substrate by the first elastic elements; and a dynamic absorber elastically coupled to the suspended mass by the second elastic elements, the dynamic absorber being configured to absorb at least some disturbance forces that would otherwise act on the suspended mass. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification