ANGULAR VELOCITY SENSOR
First Claim
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1. An angular velocity sensor comprising:
- a drive circuit to generate a drive signal;
a vibrating weight;
a vibrating unit to vibrate the vibrating weight along a first axis and a second axis according to the drive signal;
an output unit to output a signal based on Coriolis force that occurs corresponding to angular velocity and vibration of the vibrating weight;
a detection circuit to detect the angular velocity from the signal based on the Coriolis force;
a first vibration attenuating unit to electrically consume kinetic energy of the vibrating weight, the first vibration attenuating unit including a resistance; and
a vibration direction switching unit to switch driving of the vibrating unit, and switch a vibration direction of the vibrating weight from one of the first axis and the second axis to the other, whereinthe vibrating unit is connected to the resistance before the vibration direction switching unit switches the vibration direction.
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Abstract
An angular velocity sensor comprising: a drive circuit to generate a drive signal; a vibrating weight; a vibrating unit to vibrate the vibrating weight along a first axis and a second axis according to the drive signal; an output unit to output a signal based on Coriolis force that occurs corresponding to angular velocity and vibration of the vibrating weight; a detection circuit to detect the angular velocity from the signal based on the Coriolis force; a first vibration attenuating unit to electrically consume kinetic energy of the vibrating weight is provided.
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Citations
27 Claims
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1. An angular velocity sensor comprising:
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a drive circuit to generate a drive signal; a vibrating weight; a vibrating unit to vibrate the vibrating weight along a first axis and a second axis according to the drive signal; an output unit to output a signal based on Coriolis force that occurs corresponding to angular velocity and vibration of the vibrating weight; a detection circuit to detect the angular velocity from the signal based on the Coriolis force; a first vibration attenuating unit to electrically consume kinetic energy of the vibrating weight, the first vibration attenuating unit including a resistance; and a vibration direction switching unit to switch driving of the vibrating unit, and switch a vibration direction of the vibrating weight from one of the first axis and the second axis to the other, wherein the vibrating unit is connected to the resistance before the vibration direction switching unit switches the vibration direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A driving method of an angular velocity sensor, the driving method comprising:
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vibrating a vibrating weight of the angular velocity sensor along a first axis; electrically consuming kinetic energy of the vibrating weight by a resistance; and vibrating the vibrating weight along a second axis. - View Dependent Claims (27)
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Specification