MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION
First Claim
Patent Images
1. A mask frame assembly for thin film deposition, the mask frame assembly comprising:
- a mask frame having an opening surrounded by the mask frame; and
a support extending across the opening to support a mask on the mask frame,the support including a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.
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Abstract
Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.
24 Citations
20 Claims
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1. A mask frame assembly for thin film deposition, the mask frame assembly comprising:
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a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame, the support including a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification