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PLASMA PROCESSING APPARATUS AND UPPER ELECTRODE ASSEMBLY

  • US 20160013026A1
  • Filed: 07/08/2015
  • Published: 01/14/2016
  • Est. Priority Date: 07/11/2014
  • Status: Active Grant
First Claim
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1. A plasma processing apparatus comprising:

  • supporting members each of which is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity;

    connecting members each of which is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member; and

    a sliding member configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting members and lifting the upper electrode to the cooling plate.

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