PLASMA PROCESSING APPARATUS AND UPPER ELECTRODE ASSEMBLY
First Claim
1. A plasma processing apparatus comprising:
- supporting members each of which is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity;
connecting members each of which is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member; and
a sliding member configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting members and lifting the upper electrode to the cooling plate.
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Accused Products
Abstract
A plasma processing apparatus includes supporting members, connecting members and a sliding member. Each of the supporting members is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity. Each of the connecting members is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member. The sliding member is configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting member and lifting the upper electrode to the cooling plate.
16 Citations
9 Claims
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1. A plasma processing apparatus comprising:
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supporting members each of which is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity; connecting members each of which is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member; and a sliding member configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting members and lifting the upper electrode to the cooling plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An upper electrode assembly comprising:
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supporting members each of which is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity; connecting members each of which is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member; and a sliding member configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting members and lifting the upper electrode to the cooling plate.
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Specification