VARIABLE SHOWERHEAD FLOW BY VARYING INTERNAL BAFFLE CONDUCTANCE
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Abstract
Apparatuses and techniques for providing for variable radial flow conductance within a semiconductor processing showerhead are provided. In some cases, the radial flow conductance may be varied dynamically during use. In some cases, the radial flow conductance may be fixed but may vary as a function of radial distance from the showerhead centerline. Both single plenum and dual plenum showerheads are discussed.
14 Citations
21 Claims
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1. (canceled)
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2. An apparatus comprising:
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an outer wall, the outer wall substantially axially symmetric about a first axis; a first inlet; a second inlet; and a dual plenum volume substantially defined by the outer wall, the dual plenum volume divided into an even number of sub-volumes by radial barriers substantially extending from locations proximate to the first axis to the outer wall, wherein; each sub-volume has a plurality of plenum gas distribution holes passing through a bottom portion of the outer wall, the odd sub-volumes form a first plenum volume, the even sub-volumes form a second plenum volume, the first inlet is configured to supply a first process gas to the odd sub-volumes, the second inlet is configured to supply a second process gas to the even sub-volumes, the first plenum volume is fluidically isolated from the second plenum volume between the plenum gas distribution holes and the first inlet, and the second plenum volume is fluidically isolated from the first plenum volume between the plenum gas distribution holes and the second inlet. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 19, 20, 21)
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15. A semiconductor processing tool comprising:
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a semiconductor processing chamber; and a dual-plenum showerhead, the dual-plenum showerhead including; an outer wall, the outer wall substantially axially symmetric about a first axis; a first inlet; a second inlet; and a dual plenum volume substantially defined by the outer wall, the dual plenum volume divided into an even number of sub-volumes by radial barriers substantially extending from locations proximate to the first axis to the outer wall, wherein; each sub-volume has a plurality of plenum gas distribution holes passing through a bottom portion of the outer wall, the odd sub-volumes form a first plenum volume, the even sub-volumes form a second plenum volume, the first inlet is configured to supply a first process gas to the odd sub-volumes, the second inlet is configured to supply a second process gas to the even sub-volumes, the first plenum volume is fluidically isolated from the second plenum volume between the plenum gas distribution holes and the first inlet, the second plenum volume is fluidically isolated from the first plenum volume between the plenum gas distribution holes and the second inlet, and the dual-plenum showerhead is configured to deliver the first process gas and the second process gas to a semiconductor wafer when the semiconductor wafer within the semiconductor processing chamber. - View Dependent Claims (16, 17, 18)
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Specification