SHOWERHEAD ASSEMBLY AND COMPONENTS THEREOF

• US 20160024656A1
• Filed: 07/28/2014
• Published: 01/28/2016
• Est. Priority Date: 07/28/2014
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: White, Carl, Shero, Eric, Winkler, Jereld Lee, Marquardt, David
• Granted Patent: US 10,858,737 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles

Abstract

Showerhead assemblies, gas distribution plates, and systems including the same are disclosed. Exemplary showerhead assemblies include a gas distribution plate. Exemplary gas distribution plates include apertures designed to direct a flow of gas and to reduce stagnation of gas on surfaces of the plates.

Claims

1. A showerhead assembly for distributing a gas within a reaction chamber, the showerhead assembly comprising:

a gas distribution plate comprising a first surface and a second surface;

a chamber formed within the assembly, the chamber adjacent to the first surface of the gas distribution plate; and

a plurality of apertures extending from the first surface to the second surface, wherein each of the plurality of apertures comprises;

a first section comprising a first-section first end in contact with the first surface, a first-section second end, and a first-section tapering wall there between, wherein a cross-sectional area of the first-section first end is greater than a cross-sectional area of the first-section second end;

a conduit comprising a conduit first end fluidly coupled to the first-section second end and a conduit second end; and

a second section comprising a second-section first end in contact with the second surface, a second-section second end fluidly coupled to the conduit second end, and a second-section tapering wall there between, wherein a cross-sectional area of the second-section first end is greater than a cross-sectional area of the second-section second end.

2. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein the first section, the conduit, and the second section share a common axis, and a length of the conduit along the common axis is between about 0.5 mm and about 50 mm.

3. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein the first section and the conduit share a common axis, and a ratio of a length of the conduit to a length of the first section along the common axis ranges between about 1:

1 to about 8;

1.

4. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein the second section and the conduit share a common axis, and a ratio of a length of the conduit to a length of the second section along the common axis ranges between about 1:

1 to about 8;

1.

5. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein a length of the first section ranges from about 0.25 mm to about 20 mm.

6. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein a length of the second section ranges from about 0.25 mm to about 20 mm.

7. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein a cross-sectional width of the conduit is about 0.5 mm to about 2 mm.

8. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein an angle of opposing sides of the first-section tapering wall is between about 30 degrees to less than 90 degrees.

9. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein an angle of opposing sides of the second-section tapering wall is between about 30 degrees to less than 90 degrees.

10. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein the gas distribution plate comprises between about 100 and 1500 apertures.

11. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein a distance between centers of adjacent apertures along a first axis is between about 5 mm and about 20 mm.

12. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein a distance on a second surface between perimeters of adjacent apertures is between 0 mm and about 5 mm.

13. The showerhead assembly for distributing a gas within a reaction chamber of claim 1, wherein one or more of the first section and the second section comprise a frusto-conical shape.

14. A gas distribution plate comprising:

a first surface and a second surface; and

a plurality of apertures extending from the first surface to the second surface, wherein each of the plurality of apertures comprises;

a first section comprising a first-section first end in contact with the first surface, a first-section second end, and a first-section tapering wall there between, wherein a cross-sectional area of the first-section first end is greater than a cross-sectional area of the first-section second end;

a conduit comprising a conduit first end fluidly coupled to the first-section second end and a conduit second end; and

a second section comprising a second-section first end in contact with the second surface, a second-section second end fluidly coupled to the conduit second end, and a second-section tapering wall there between, wherein a cross-sectional area of the second-section first end is greater than a cross-sectional area of the second-section second end.

15. The gas distribution plate of claim 14, wherein a distance between centers of adjacent apertures along a first axis is between about 2 mm and about 20 mm.

16. The gas distribution plate of claim 14, wherein a distance on the second surface between perimeters of adjacent apertures is between 0 mm and about 5 mm.

17. The gas distribution plate of claim 14, wherein a length of the aperture is greater than 1 mm.

18. The gas distribution plate of claim 14, wherein one or more of the first section and the second section comprise a frusto-conical shape.

19. A gas distribution plate comprising:

a first surface and a second surface; and

a plurality of apertures extending from the first surface to the second surface, wherein each of the plurality of apertures comprises;

a first section comprising a first-section first end in contact with the first surface, a first-section second end, and a first-section tapering wall there between, wherein a cross-sectional area of the first-section first end is greater than a cross-sectional area of the first-section second end;

a conduit comprising a conduit first end fluidly coupled to the first-section second end and a conduit second end; and

a second section comprising a second-section first end in contact with the second surface, a second-section second end fluidly coupled to the conduit second end, and a second-section tapering wall there between, wherein a cross-sectional area of the second-section first end is greater than a cross-sectional area of the second-section second end, wherein

the first section, the conduit, and the second section share a common axis, and wherein

a ratio of a length of the conduit to a length of the first section along the common axis ranges between about 1;

1 to about 8;

1, and wherein

a ratio of a length of the conduit to a length of the second section along the common axis ranges between about 1;

1 to about 8;

1.

20. The gas distribution plate of claim 19, wherein an angle between opposing sides of the second-section tapering wall is between about 30 degrees to less than 90 degrees.