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SUBSTRATE PROCESSING SYSTEM, STORAGE MEDIUM AND METHOD OF REGISTERING NEW DEVICE

  • US 20160026480A1
  • Filed: 07/28/2014
  • Published: 01/28/2016
  • Est. Priority Date: 07/28/2014
  • Status: Active Grant
First Claim
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1. A substrate processing system comprising:

  • a main control unit having a configuration file in which ID information and detail information about devices for processing a substrate is recorded, the detail information includes information needed for controlling the devices; and

    a module controller having a list file obtained by converting the configuration file into a readable form, the module controller controlling the devices described in the list file on the basis of instructions from the main control unit,wherein the module controller automatically adds, to the list file, ID information and detail information about a new device newly connected to the module controller to establish a condition under which the new device can be controlled.

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