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SEMICONDUCTOR DEVICES AND STRUCTURES

  • US 20160027882A1
  • Filed: 10/05/2015
  • Published: 01/28/2016
  • Est. Priority Date: 06/19/2013
  • Status: Active Grant
First Claim
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1. A semiconductor device structure, comprising:

  • a plurality of features extending from a substrate, neighboring features of the plurality spaced from one another by a trench exposing a portion of the substrate, at least one feature of the plurality comprising;

    a region of at least one conductive material over the substrate; and

    a liner on sidewalk of the region of the at least one conductive material.

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  • 7 Assignments
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