METHOD FOR MANUFACTURING COPLANAR OXIDE SEMICONDUCTOR TFT SUBSTRATE

• US 20160027904A1
• Filed: 08/15/2014
• Published: 01/28/2016
• Est. Priority Date: 07/22/2014
• Status: Abandoned Application

• Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd. (TCL Technology Group Corp.)
• Original Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd. (TCL Technology Group Corp.)
• Inventors: LV, Xiaowen, TSENG, Chihyuan, SU, Chihyu, HU, Yutong, LI, Wenhui, SHI, Longqiang, ZHANG, Hejing
• Application Number:
  US14/382,303
• Publication Number:
  US 20160027904A1
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: H01L 21/02565 Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
• CPC Class Codes: H01L 21/443 from a gas or vapour, e.g. condensation
• CPC Class Codes: H01L 21/47573 Etching the layer
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/24 including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22 including organic materials H10K99/00
• CPC Class Codes: H01L 29/42384 for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

The present invention provides a method for manufacturing a coplanar oxide semiconductor TFT substrate, which includes: step 1: providing a substrate (1); step 2: forming a gate terminal (2); step 3: depositing a gate insulation layer (3); step 4: forming a photoresist layer (4) on the gate insulation layer (3); step 5: subjecting the photoresist layer (4) to sectionized exposure and development to form a through hole (41) and a plurality of recesses (42); step 6: removing a portion of the gate insulation layer (3) under the through hole (41); step 7: removing portions of the photoresist layer (4) under the plurality of recesses (42) of the photoresist layer (4); step 8: depositing a second metal layer (5) on the gate insulation layer (3) and a remaining photoresist layer (4′); step 9: removing the remaining photoresist layer (4′) and a portion of the second metal layer (5) deposited thereon to form source/drain terminals (51); Step 10: depositing and patternizing an oxide semiconductor layer (6); and step 11: depositing and patternizing a protection layer (7).

Claims

1. A method for manufacturing a coplanar oxide semiconductor TFT substrate, comprising the following steps:

(1) providing a substrate;

(2) depositing and patternizing a first metal layer on the substrate to form a gate terminal;

(3) depositing a gate insulation layer on the gate terminal and the substrate to have the gate insulation layer completely cover the gate terminal and the substrate;

(4) forming a photoresist layer of a predetermined thickness on the gate insulation layer;

(5) subjecting the photoresist layer to sectionized exposure and development;

wherein full exposure and development are performed on an area of the photoresist layer that corresponds to a connection hole to be formed in the gate insulation layer so as to form a through hole;

half exposure and development are performed on areas of the photoresist layer that corresponds to source/drain terminals to be formed so as to form a plurality of recesses; and

no exposure is performed on a remaining area of the photoresist layer;

(6) applying etching to remove a portion of the gate insulation layer that is under the through hole so as to form a connection hole in the gate insulation layer for exposing a portion of the gate terminal that is under the connection hole;

(7) removing portions of the photoresist layer that are under the plurality of recesses of the photoresist layer for exposing portions of the gate insulation layer that are under the plurality of recesses;

(8) depositing a second metal layer on the gate insulation layer and a remaining photoresist layer in such a way that the second metal layer is filled in the connection hole to connect with the gate terminal;

(9) removing the remaining photoresist layer and portions of the second metal layer deposited thereon so as to form source/drain terminals;

(10) depositing and patternizing an oxide semiconductor layer on the source/drain terminals and the gate insulation layer; and

(11) depositing and patternizing a protection layer on the oxide semiconductor layer and the source/drain terminals.

2. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein patternizing is achieved through photolithography.

3. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (5), a half-tone process is applied to perform the sectionized exposure of the photoresist layer.

4. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (5), the recesses of the photoresist layer have a depth H that is greater than a thickness of the source/drain terminals to be formed.

5. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (6), dry etching is applied to remove the portion of the gate insulation layer that is located under the through hole.

6. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (7), O₂ ashing is applied to remove the portions of the photoresist layer that are located under the plurality of recesses of the photoresist layer

7. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (8), physical vapor deposition is applied to deposit the second metal layer on the gate insulation layer and the remaining photoresist layer.

8. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (9), a stripping solution is applied to strip and remove the remaining photoresist layer and a portion of the second metal layer deposited thereon in order to form the source/drain terminals.

9. The method for manufacturing a coplanar oxide semiconductor TFT substrate as claimed in claim 1, wherein in Step (10), a material that makes the oxide semiconductor layer is indium gallium zinc oxides (IGZO).

10. A method for manufacturing a coplanar oxide semiconductor TFT substrate, comprising the following steps:

(1) providing a substrate;

(2) depositing and patternizing a first metal layer on the substrate to form a gate terminal;

(3) depositing a gate insulation layer on the gate terminal and the substrate to have the gate insulation layer completely cover the gate terminal and the substrate;

(4) forming a photoresist layer of a predetermined thickness on the gate insulation layer;

(5) subjecting the photoresist layer to sectionized exposure and development;

wherein full exposure and development are performed on an area of the photoresist layer that corresponds to a connection hole to be formed in the gate insulation layer so as to form a through hole;

half exposure and development are performed on areas of the photoresist layer that corresponds to source/drain terminals to be formed so as to form a plurality of recesses; and

no exposure is performed on a remaining area of the photoresist layer;

(6) applying etching to remove a portion of the gate insulation layer that is under the through hole so as to form a connection hole in the gate insulation layer for exposing a portion of the gate terminal that is under the connection hole;

(7) removing portions of the photoresist layer that are under the plurality of recesses of the photoresist layer for exposing portions of the gate insulation layer that are under the plurality of recesses;

(8) depositing a second metal layer on the gate insulation layer and a remaining photoresist layer in such a way that the second metal layer is filled in the connection hole to connect with the gate terminal;

(9) removing the remaining photoresist layer and portions of the second metal layer deposited thereon so as to form source/drain terminals;

(10) depositing and patternizing an oxide semiconductor layer on the source/drain terminals and the gate insulation layer; and

(11) depositing and patternizing a protection layer on the oxide semiconductor layer and the source/drain terminals;

wherein patternizing is achieved through photolithography;

wherein in Step (5), a half-tone process is applied to perform the sectionized exposure of the photoresist layer;

wherein in Step (5), the recesses of the photoresist layer have a depth H that is greater than a thickness of the source/drain terminals to be formed;

wherein in Step (6), dry etching is applied to remove the portion of the gate insulation layer that is located under the through hole;

wherein in Step (7), O₂ ashing is applied to remove the portions of the photoresist layer that are located under the plurality of recesses of the photoresist layer;

wherein in Step (8), physical vapor deposition is applied to deposit the second metal layer on the gate insulation layer and the remaining photoresist layer;

wherein in Step (9), a stripping solution is applied to strip and remove the remaining photoresist layer and a portion of the second metal layer deposited thereon in order to form the source/drain terminals; and

wherein in Step (10), a material that makes the oxide semiconductor layer is indium gallium zinc oxides (IGZO).