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UV LIGHT EMITTING DEVICES AND SYSTEMS AND METHODS FOR PRODUCTION

  • US 20160027962A1
  • Filed: 07/22/2015
  • Published: 01/28/2016
  • Est. Priority Date: 10/05/2012
  • Status: Abandoned Application
First Claim
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1. A method of fabricating an ultraviolet (UV) light emitting device comprising:

  • receiving a UV transmissive substrate;

    forming a UV transmissive layer upon the UV transmissive substrate, comprising;

    forming a first UV transmissive layer comprising aluminum nitride upon the UV transmissive substrate using a first deposition technique at a temperature less than about 800 degrees Celsius or greater than about 1200 degrees Celsius; and

    forming a second UV transmissive layer comprising aluminum nitride upon the first UV transmissive layer comprising aluminum nitride using a second deposition technique that is different from the first deposition technique, at a temperature within a range of about 800 degrees Celsius to about 1200 degrees Celsius; and

    forming a UV light emitting layer structure on the UV transmissive layer, comprising;

    forming an n-type layer comprising aluminum gallium nitride layer upon the UV transmissive layer;

    forming one or more quantum well structures comprising aluminum gallium nitride upon the n-type layer; and

    forming a p-type nitride layer upon the one or more quantum well structures.

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