PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, ALTIMETER, ELECTRONIC DEVICE, AND MOVING OBJECT
First Claim
Patent Images
1. A physical quantity sensor comprising:
- a substrate that includes a recess on a first side of the substrate;
a diaphragm that forms a bottom of the recess and is flexibly deformed by variations in atmospheric pressure;
a sensor operatively associated with the diaphragm; and
a step along a periphery of the diaphragm in plan view on a second side of the substrate,the step protruding relative to the diaphragm by an amount that is less than a depth of the recess.
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Abstract
A physical quantity sensor includes a substrate that includes a recessed portion which is open on one face of the substrate, a diaphragm portion that includes a bottom portion of the recessed portion and is flexibly deformed by receiving pressure, a piezoresistive element that is arranged in the diaphragm portion, and a stepped portion that is arranged along the periphery of the diaphragm portion on the other face of the substrate and protrudes from the diaphragm portion in the thickness direction of the diaphragm portion by a height which is smaller than the depth of the recessed portion.
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Citations
20 Claims
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1. A physical quantity sensor comprising:
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a substrate that includes a recess on a first side of the substrate; a diaphragm that forms a bottom of the recess and is flexibly deformed by variations in atmospheric pressure; a sensor operatively associated with the diaphragm; and a step along a periphery of the diaphragm in plan view on a second side of the substrate, the step protruding relative to the diaphragm by an amount that is less than a depth of the recess. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A physical quantity sensor comprising:
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a substrate having first and second sides; an open recess in the first side of the substrate; a pressure reference chamber on the second side of the substrate; a diaphragm having a first surface forming a bottom of the open recess and a second surface forming a ceiling of the pressure reference chamber, the diaphragm being configured to flexibly deform by variations in atmospheric pressure; a sensor embedded in the diaphragm; and a step along a periphery of the diaphragm, the step interconnecting the second surface of the diaphragm and a side wall of the pressure reference chamber, the step being exposed to an interior of the pressure reference chamber, wherein the step protrudes relative to the diaphragm by an amount that is less than a depth of the open recess. - View Dependent Claims (18, 19, 20)
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Specification