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SPECIMEN MEASURING DEVICE AND COMPUTER PROGRAM PRODUCT

  • US 20160040985A1
  • Filed: 08/03/2015
  • Published: 02/11/2016
  • Est. Priority Date: 08/05/2014
  • Status: Active Grant
First Claim
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1. A specimen measuring device comprising:

  • a light source device that irradiates a specimen surface of a specimen with illumination light from multiple illumination units at a plurality of illumination angles;

    a spectral camera device that is arranged above the specimen surface, spectrally separates reflected light from the specimen surface, and acquires 2D spectral information through a single image capturing operation; and

    a calculating unit that calculates deflection angle spectral information of the specimen surface used to measure a measurement value of a certain evaluation item of the specimen using a change in an optical geometrical condition of an illumination direction and an image capturing direction between pixels in an X axis direction and a Y axis direction of the spectral information.

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