OPTICAL BENCH APPARATUS HAVING INTEGRATED MONITOR PHOTODETECTORS AND METHOD FOR MONITORING OPTICAL POWER USING SAME

• US 20160041352A1
• Filed: 10/26/2015
• Published: 02/11/2016
• Est. Priority Date: 12/31/2012
• Status: Active Grant

• Current Assignee: Zephyr Photonics
• Original Assignee: Zephyr Photonics
• Inventors: Louderback, Duane
• Granted Patent: US 9,465,177 B2
• Time in Patent Office: Days
• US Class Current: 1/1
• CPC Class Codes: G01J 1/4257 applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam monitoring arrangements for lasers in general H01S3/0014
• CPC Class Codes: G02B 1/11 Anti-reflection coatings
• CPC Class Codes: G02B 6/4286 Optical modules with optical power monitoring
• CPC Class Codes: H04B 10/07955 Monitoring or measuring power
• CPC Class Codes: H04B 10/0799 Monitoring line transmitter or line receiver equipment
• CPC Class Codes: H04B 10/40 Transceivers
• CPC Class Codes: H04B 10/5057 using a feedback signal generated by analysing the optical output

Abstract

Optical bench structure provides a platform for integrating optical transmitters, particularly Vertical-Cavity Surface-Emitting Lasers (VCSELs), with monitor photodetectors. A substrate with photodetectors on the front side is aligned with flip-chip bonding bumps so the emission of the transmitters is aligned with the monitor photodetectors and passes through the monitor photodetectors with a portion of the transmitted light absorbed by the monitor photodetectors. The photodetectors have a thin absorption region so the percentage of light absorbed may be relatively small, providing sufficient photocurrent to monitor the transmitted power having a minimal effect on the transmitted power. Microlenses are integrated on the backside of the substrate focus, steer and/or collimate the emitted optical beams from the transmitters. The structure enables photodetectors to be integrated on the optical bench allowing the received optical power to be monitored. The receiver photodetectors are integrated on the optical bench alone and/or in combination with the transmitters.

Claims

1-34. -34. (canceled)

35. An optical bench apparatus comprising:

a substrate having a first side and a second side, wherein the second side is located opposite the first side;

an optical power monitor on the first side of the substrate;

a photodetector configured to detect an optical input that passes through the substrate and the optical power monitor;

first group of electrical interconnect lines located on the substrate, wherein the first electrical interconnect lines are configured to connect to the photodetector;

second group of electrical interconnect lines located on the substrate and configured to connect to the optical power monitor; and

a bonding site on the substrate configured to bond to the photodetector, wherein the bonding site is located to optically align the photodetector with the optical power monitor such that the optical input received through the substrate impinges on the optical power monitor,

wherein the optical power monitor is configured to receive the optical input that passes through the substrate and absorb a portion of the received optical input so that the portion of the optical input received by the photodetector is less than all of the optical input that passes through the substrate.

36. The apparatus of claim 35, wherein the optical power monitor is configured to transmit the optical input that passes through the substrate.

37. The apparatus of claim 35, wherein the substrate is configured to transmit a first portion of the optical input, and wherein the optical power monitor is configured to absorb a second portion of the optical input.

38. The apparatus of claim 35, further comprising:

a lens on the second side of the substrate opposite the photodetector, wherein the lens is configured to collimate, focus, or steer the optical input.

39. The apparatus of claim 35, wherein the substrate has a surface having an anti-reflection coating.

40. The apparatus of claim 35, wherein the first and second groups of electrical interconnect lines are impedance matched.

41. The apparatus of claim 35, wherein the substrate includes a semiconductor, Gallium Arsenide (GaAs), semi-insulating Gallium Arsenide, Aluminum Gallium Arsenide (AlGaAs), Indium Phosphide (InP), silicon, an insulator, sapphire or quartz glass.

42. The apparatus of claim 35, wherein the light transmitter includes a light emitting diode (LED), a vertical-cavity surface-emitting laser (VCSEL), a Fabry-Perot laser having an angled mirror for vertical emission, a distributed feedback (DFB) laser having an angled mirror for vertical emission, or a distributed feedback (DFB) laser having a diffraction grating for vertical emission.

43. The apparatus of claim 35, wherein the optical power monitor includes a single crystal semiconductor, a polycrystalline material, an amorphous material, silicon, germanium, Indium Gallium Arsenide (InGaAs), a p-i-n photodetector, or a metal-semiconductor-metal (MSM) photodetector.

44. The apparatus of claim 35, wherein the optical power monitor has an absorbing region, wherein the absorbing region includes a bulk material, quantum well, or quantum dots.

45. The apparatus of claim 35, wherein the bonding site configured to bond to the photodetector includes a flip-chip bond or by die placement.

46. The apparatus of claim 35, wherein the optical power monitor and the photodetector are integrated on the substrate.

47. An optical bench apparatus comprising:

a photodetector configured to detect an optical signal;

a substrate configured to transmit at least a portion of the optical signal;

an optical power monitor disposed on the substrate, wherein the optical power monitor is configured to receive the optical signal transmitted by the substrate and absorb a portion of the received optical signal so that less than all of the optical signal arrives at the photodetector; and

a receiver substrate including a photodetector electrically connected to the substrate to align the photodetector with the optical power monitor so that the photodetector and the optical power monitor detect the optical input transmitted through the substrate.

48. The apparatus of claim 47, wherein the photodetector is configured to receive the optical input through the optical power monitor photodetector.

49. The apparatus of claim 47, wherein the optical power monitor photodetector is configured to absorb a first part of the optical input, and wherein the photodetector is configured to receive a second part of the optical input.

50. The apparatus of claim 47, further comprising:

a lens disposed on the substrate to collimate, focus or steer the optical input to the photodetector.

51. The apparatus of claim 50, wherein the lens includes a refractive lens, or a diffractive lens.

52. The apparatus of claim 47, comprising:

an anti-reflection coating on a surface of the substrate.

53. The apparatus of claim 47, comprising:

a first group of electrical interconnect lines located on the substrate to connect to the photodetector; and

a second group of electrical interconnect lines located on the substrate to connect to the optical power monitor.

54. The apparatus of claim 53, wherein the first and second groups of electrical interconnect lines are impedance matched.

55. The apparatus of claim 47, wherein the substrate includes a semiconductor, Gallium Arsenide (GaAs), semi-insulating Gallium Arsenide, Aluminum Gallium Arsenide (AlGaAs), Indium Phosphide (InP), silicon, an insulator, sapphire, or quartz glass.

56. The apparatus of claim 47, wherein the photodetector includes a p-i-n photodetector, a resonant cavity photodetector, an avalanche photodetector, or a metal-semiconductor-metal (MSM) photodetector.

57. The apparatus of claim 47, wherein the receiver substrate that includes the photodetector is connected to the substrate by flip-chip bonding or by die placement.

58. The apparatus of claim 47, wherein the optical power monitor is integrated on the substrate.

59. A method of monitoring optical power in an optical link comprising:

detecting, by an optical power monitor aligned with a photodetector in an optical bench apparatus, an optical input that impinges on the optical power monitor;

absorbing, by the optical power monitor, a fraction of the detected optical input so that less than all of the optical input reaches the photodetector;

converting, by the optical power monitor, the absorbed fraction of the detected optical input into a monitor photocurrent; and

monitoring the optical power of the detected optical input based on the monitor photocurrent.

60. The method of claim 59, further comprising:

adjusting bias and modulation currents to achieve desired operating characteristics of the optical link.

61. The method of claim 59, further comprising:

implementing health monitoring in a transceiver by monitoring received power in the optical link.

62. The method of claim 59, further comprising:

implementing built-in test functions in a transceiver by monitoring received power in the optical link.

63. A method of manufacturing an optical bench apparatus, comprising:

providing an optical bench apparatus having a substrate and an integrated optical power monitor photodetector;

providing electrical interconnect lines on the substrate;

integrating a photodetector with some of the electrical interconnect lines to the optical bench apparatus;

connecting the optical power monitor with some other of the electrical interconnect lines to the optical bench apparatus; and

aligning the photodetector with the optical power monitor such that an optical input is transmitted through the optical power-monitor and the photodetector,

wherein the optical power monitor photodetector is integrated with the substrate to absorb a portion of the optical input so that less than all of the optical input passes through the substrate.

64. The method of claim 63, comprising:

epitaxially growing the optical power monitor.