ROTATION RATE SENSOR
1 Assignment
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Accused Products
Abstract
A micromechanical rotation rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; a second Coriolis element; a drive device for deflecting the first and second Coriolis elements from a neutral position;
and a detection device. The first Coriolis element, with regard to a first axis extending in parallel to the main plane of extension, has a mass-symmetrical design with respect to the second Coriolis element. The first and second Coriolis elements have a common main plane of extension, and in the neutral position the shared main plane of extension extends in parallel to the main plane of extension of the substrate. The first and second Coriolis elements each have a mass-symmetrical design with respect to a second axis extending perpendicularly with respect to the first axis. The first and second Coriolis elements are drivable by the drive device.
6 Citations
20 Claims
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1-10. -10. (canceled)
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11. A micromechanical structure configured as a rotation rate sensor, comprising:
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a substrate having a main plane of extension; a first Coriolis element; a second Coriolis element; at least one drive device for deflecting the first Coriolis element and the second Coriolis element from a neutral position; at least one detection device; at least one first deflection element; and at least one second deflection element; wherein; the first Coriolis element, with regard to a first axis extending in parallel to the main plane of extension, has a mass-symmetrical design with respect to the second Coriolis element; the first Coriolis element and the second Coriolis element have a common main plane of extension; in the neutral position the common main plane of extension extends in parallel to the main plane of extension of the substrate; the first Coriolis element and the second Coriolis element each have a mass-symmetrical design with respect to a second axis extending perpendicularly with respect to the first axis; the first Coriolis element and the second Coriolis element being drivable by the drive device to undergo a rotational vibration about the first axis; in the case of a rotation rate acting in parallel to the projection of the second axis onto the main plane of extension to provide an action of force of the Coriolis force, in the sense of a rotational vibration, the first Coriolis element and the second Coriolis element being deflectable about a third axis extending perpendicularly with respect to the main plane of extension and extending through the intersection point of the first axis and the second axis; the first deflection element and the second deflection element having a mass-symmetrical design with respect to the first axis and with respect to the second axis; and the first deflection element is coupled at least to the first Coriolis element, and the second deflection element is coupled at least to the second Coriolis element, in such a way that the action of force of the Coriolis force on the first Coriolis element and on the second Coriolis element, in the sense of a rotational vibration of the first deflection element and of the second deflection element about the third axis, is detectable by the detection device. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification